{"status":"public","publication":"Technisches Messen","type":"journal_article","language":[{"iso":"eng"}],"department":[{"_id":"977"}],"user_id":"15911","_id":"64401","intvolume":"        85","page":"104 - 110","citation":{"bibtex":"@article{Finkeldey_Schellenberg_Brenner_Hofmann_Gerhardt_Göring_2017, title={Optical metrology for the investigation of buried technical structures}, volume={85}, DOI={<a href=\"https://doi.org/10.1515/teme-2017-0096\">10.1515/teme-2017-0096</a>}, number={2}, journal={Technisches Messen}, author={Finkeldey, Markus and Schellenberg, Falk and Brenner, Carsten and Hofmann, Martin R. and Gerhardt, Nils Christopher and Göring, Lena}, year={2017}, pages={104–110} }","short":"M. Finkeldey, F. Schellenberg, C. Brenner, M.R. Hofmann, N.C. Gerhardt, L. Göring, Technisches Messen 85 (2017) 104–110.","mla":"Finkeldey, Markus, et al. “Optical Metrology for the Investigation of Buried Technical Structures.” <i>Technisches Messen</i>, vol. 85, no. 2, 2017, pp. 104–10, doi:<a href=\"https://doi.org/10.1515/teme-2017-0096\">10.1515/teme-2017-0096</a>.","ama":"Finkeldey M, Schellenberg F, Brenner C, Hofmann MR, Gerhardt NC, Göring L. Optical metrology for the investigation of buried technical structures. <i>Technisches Messen</i>. 2017;85(2):104-110. doi:<a href=\"https://doi.org/10.1515/teme-2017-0096\">10.1515/teme-2017-0096</a>","apa":"Finkeldey, M., Schellenberg, F., Brenner, C., Hofmann, M. R., Gerhardt, N. C., &#38; Göring, L. (2017). Optical metrology for the investigation of buried technical structures. <i>Technisches Messen</i>, <i>85</i>(2), 104–110. <a href=\"https://doi.org/10.1515/teme-2017-0096\">https://doi.org/10.1515/teme-2017-0096</a>","ieee":"M. Finkeldey, F. Schellenberg, C. Brenner, M. R. Hofmann, N. C. Gerhardt, and L. Göring, “Optical metrology for the investigation of buried technical structures,” <i>Technisches Messen</i>, vol. 85, no. 2, pp. 104–110, 2017, doi: <a href=\"https://doi.org/10.1515/teme-2017-0096\">10.1515/teme-2017-0096</a>.","chicago":"Finkeldey, Markus, Falk Schellenberg, Carsten Brenner, Martin R. Hofmann, Nils Christopher Gerhardt, and Lena Göring. “Optical Metrology for the Investigation of Buried Technical Structures.” <i>Technisches Messen</i> 85, no. 2 (2017): 104–10. <a href=\"https://doi.org/10.1515/teme-2017-0096\">https://doi.org/10.1515/teme-2017-0096</a>."},"year":"2017","issue":"2","doi":"10.1515/teme-2017-0096","title":"Optical metrology for the investigation of buried technical structures","volume":85,"author":[{"first_name":"Markus","full_name":"Finkeldey, Markus","last_name":"Finkeldey"},{"first_name":"Falk","full_name":"Schellenberg, Falk","last_name":"Schellenberg"},{"last_name":"Brenner","full_name":"Brenner, Carsten","first_name":"Carsten"},{"full_name":"Hofmann, Martin R.","last_name":"Hofmann","first_name":"Martin R."},{"id":"115298","full_name":"Gerhardt, Nils Christopher","orcid":"0009-0002-5538-231X","last_name":"Gerhardt","first_name":"Nils Christopher"},{"first_name":"Lena","last_name":"Göring","full_name":"Göring, Lena"}],"date_created":"2026-02-20T10:04:09Z","date_updated":"2026-02-25T10:13:46Z"}