{"title":"Common-path digital holography microscopy of buried semiconductor specimen","language":[{"iso":"eng"}],"_id":"64412","date_updated":"2026-02-25T10:10:22Z","department":[{"_id":"977"}],"author":[{"first_name":"Nils Christopher","id":"115298","full_name":"Gerhardt, Nils Christopher","orcid":"0009-0002-5538-231X","last_name":"Gerhardt"},{"full_name":"Hofmann, Martin R.","last_name":"Hofmann","first_name":"Martin R."},{"first_name":"Markus","last_name":"Finkeldey","full_name":"Finkeldey, Markus"},{"last_name":"Göring","full_name":"Göring, Lena","first_name":"Lena"}],"user_id":"15911","date_created":"2026-02-20T10:04:11Z","year":"2016","status":"public","citation":{"chicago":"Gerhardt, Nils Christopher, Martin R. Hofmann, Markus Finkeldey, and Lena Göring. “Common-Path Digital Holography Microscopy of Buried Semiconductor Specimen,” 2016.","ieee":"N. C. Gerhardt, M. R. Hofmann, M. Finkeldey, and L. Göring, “Common-path digital holography microscopy of buried semiconductor specimen,” 2016.","ama":"Gerhardt NC, Hofmann MR, Finkeldey M, Göring L. Common-path digital holography microscopy of buried semiconductor specimen. In: ; 2016.","bibtex":"@inproceedings{Gerhardt_Hofmann_Finkeldey_Göring_2016, title={Common-path digital holography microscopy of buried semiconductor specimen}, author={Gerhardt, Nils Christopher and Hofmann, Martin R. and Finkeldey, Markus and Göring, Lena}, year={2016} }","short":"N.C. Gerhardt, M.R. Hofmann, M. Finkeldey, L. Göring, in: 2016.","mla":"Gerhardt, Nils Christopher, et al. <i>Common-Path Digital Holography Microscopy of Buried Semiconductor Specimen</i>. 2016.","apa":"Gerhardt, N. C., Hofmann, M. R., Finkeldey, M., &#38; Göring, L. (2016). <i>Common-path digital holography microscopy of buried semiconductor specimen</i>."},"type":"conference"}