{"status":"public","publication":"Practical Holography XXX: Materials and Applications","type":"conference","language":[{"iso":"eng"}],"department":[{"_id":"977"}],"user_id":"15911","_id":"64420","citation":{"short":"M. Finkeldey, F. Schellenberg, N.C. Gerhardt, C. Paar, M. Hofmann, in: Practical Holography XXX: Materials and Applications, 2016.","bibtex":"@inproceedings{Finkeldey_Schellenberg_Gerhardt_Paar_Hofmann_2016, title={Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures}, DOI={<a href=\"https://doi.org/10.1117/12.2212454\">10.1117/12.2212454</a>}, booktitle={Practical Holography XXX: Materials and Applications}, author={Finkeldey, Markus and Schellenberg, Falk and Gerhardt, Nils Christopher and Paar, Christof and Hofmann, Martin}, year={2016} }","mla":"Finkeldey, Markus, et al. “Common-Path Depth-Filtered Digital Holography for High Resolution Imaging of Buried Semiconductor Structures.” <i>Practical Holography XXX: Materials and Applications</i>, 2016, doi:<a href=\"https://doi.org/10.1117/12.2212454\">10.1117/12.2212454</a>.","apa":"Finkeldey, M., Schellenberg, F., Gerhardt, N. C., Paar, C., &#38; Hofmann, M. (2016). Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures. <i>Practical Holography XXX: Materials and Applications</i>. <a href=\"https://doi.org/10.1117/12.2212454\">https://doi.org/10.1117/12.2212454</a>","ama":"Finkeldey M, Schellenberg F, Gerhardt NC, Paar C, Hofmann M. Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures. In: <i>Practical Holography XXX: Materials and Applications</i>. ; 2016. doi:<a href=\"https://doi.org/10.1117/12.2212454\">10.1117/12.2212454</a>","chicago":"Finkeldey, Markus, Falk Schellenberg, Nils Christopher Gerhardt, Christof Paar, and Martin Hofmann. “Common-Path Depth-Filtered Digital Holography for High Resolution Imaging of Buried Semiconductor Structures.” In <i>Practical Holography XXX: Materials and Applications</i>, 2016. <a href=\"https://doi.org/10.1117/12.2212454\">https://doi.org/10.1117/12.2212454</a>.","ieee":"M. Finkeldey, F. Schellenberg, N. C. Gerhardt, C. Paar, and M. Hofmann, “Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures,” 2016, doi: <a href=\"https://doi.org/10.1117/12.2212454\">10.1117/12.2212454</a>."},"year":"2016","doi":"10.1117/12.2212454","title":"Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures","author":[{"first_name":"Markus","last_name":"Finkeldey","full_name":"Finkeldey, Markus"},{"first_name":"Falk","full_name":"Schellenberg, Falk","last_name":"Schellenberg"},{"first_name":"Nils Christopher","orcid":"0009-0002-5538-231X","last_name":"Gerhardt","id":"115298","full_name":"Gerhardt, Nils Christopher"},{"full_name":"Paar, Christof","last_name":"Paar","first_name":"Christof"},{"full_name":"Hofmann, Martin","last_name":"Hofmann","first_name":"Martin"}],"date_created":"2026-02-20T10:04:12Z","date_updated":"2026-02-25T10:07:13Z"}