{"date_created":"2026-02-20T10:04:27Z","author":[{"last_name":"Lai","full_name":"Lai, Ryan Yiu Wai","first_name":"Ryan Yiu Wai"},{"last_name":"Koukourakis","full_name":"Koukourakis, Nektarios","first_name":"Nektarios"},{"first_name":"Nils Christopher","full_name":"Gerhardt, Nils Christopher","id":"115298","last_name":"Gerhardt","orcid":"0009-0002-5538-231X"},{"full_name":"Hamann, Sven","last_name":"Hamann","first_name":"Sven"},{"full_name":"Ehmann, Michael","last_name":"Ehmann","first_name":"Michael"},{"first_name":"Klaus","full_name":"Hackl, Klaus","last_name":"Hackl"},{"last_name":"Ludwig","full_name":"Ludwig, Alfred","first_name":"Alfred"},{"first_name":"Robert","last_name":"Meyer","full_name":"Meyer, Robert"},{"last_name":"Hofmann","full_name":"Hofmann, Martin R.","first_name":"Martin R."},{"full_name":"Darakis, Emmanouil","last_name":"Darakis","first_name":"Emmanouil"}],"volume":19,"date_updated":"2026-02-23T12:49:25Z","doi":"10.1109/jmems.2010.2067442","title":"Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy","issue":"5","citation":{"bibtex":"@article{Lai_Koukourakis_Gerhardt_Hamann_Ehmann_Hackl_Ludwig_Meyer_Hofmann_Darakis_2010, title={Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy}, volume={19}, DOI={<a href=\"https://doi.org/10.1109/jmems.2010.2067442\">10.1109/jmems.2010.2067442</a>}, number={5}, journal={Journal of microelectromechanical systems}, author={Lai, Ryan Yiu Wai and Koukourakis, Nektarios and Gerhardt, Nils Christopher and Hamann, Sven and Ehmann, Michael and Hackl, Klaus and Ludwig, Alfred and Meyer, Robert and Hofmann, Martin R. and Darakis, Emmanouil}, year={2010}, pages={1175–1179} }","short":"R.Y.W. Lai, N. Koukourakis, N.C. Gerhardt, S. Hamann, M. Ehmann, K. Hackl, A. Ludwig, R. Meyer, M.R. Hofmann, E. Darakis, Journal of Microelectromechanical Systems 19 (2010) 1175–1179.","mla":"Lai, Ryan Yiu Wai, et al. “Integrity of Micro-Hotplates during High-Temperature Operation Monitored by Digital Holographic Microscopy.” <i>Journal of Microelectromechanical Systems</i>, vol. 19, no. 5, 2010, pp. 1175–79, doi:<a href=\"https://doi.org/10.1109/jmems.2010.2067442\">10.1109/jmems.2010.2067442</a>.","apa":"Lai, R. Y. W., Koukourakis, N., Gerhardt, N. C., Hamann, S., Ehmann, M., Hackl, K., Ludwig, A., Meyer, R., Hofmann, M. R., &#38; Darakis, E. (2010). Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy. <i>Journal of Microelectromechanical Systems</i>, <i>19</i>(5), 1175–1179. <a href=\"https://doi.org/10.1109/jmems.2010.2067442\">https://doi.org/10.1109/jmems.2010.2067442</a>","ama":"Lai RYW, Koukourakis N, Gerhardt NC, et al. Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy. <i>Journal of microelectromechanical systems</i>. 2010;19(5):1175-1179. doi:<a href=\"https://doi.org/10.1109/jmems.2010.2067442\">10.1109/jmems.2010.2067442</a>","chicago":"Lai, Ryan Yiu Wai, Nektarios Koukourakis, Nils Christopher Gerhardt, Sven Hamann, Michael Ehmann, Klaus Hackl, Alfred Ludwig, Robert Meyer, Martin R. Hofmann, and Emmanouil Darakis. “Integrity of Micro-Hotplates during High-Temperature Operation Monitored by Digital Holographic Microscopy.” <i>Journal of Microelectromechanical Systems</i> 19, no. 5 (2010): 1175–79. <a href=\"https://doi.org/10.1109/jmems.2010.2067442\">https://doi.org/10.1109/jmems.2010.2067442</a>.","ieee":"R. Y. W. Lai <i>et al.</i>, “Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy,” <i>Journal of microelectromechanical systems</i>, vol. 19, no. 5, pp. 1175–1179, 2010, doi: <a href=\"https://doi.org/10.1109/jmems.2010.2067442\">10.1109/jmems.2010.2067442</a>."},"intvolume":"        19","page":"1175 - 1179","year":"2010","user_id":"15911","department":[{"_id":"977"}],"_id":"64502","language":[{"iso":"eng"}],"type":"journal_article","publication":"Journal of microelectromechanical systems","status":"public"}