---
res:
  bibo_abstract:
  - "<jats:title>Abstract</jats:title>\r\n                  <jats:p>Lithographic surface
    patterning is a cornerstone of modern materials and device fabrication. Although
    the available lithography techniques are constantly being advanced to push the
    feature sizes down to the few-nanometer scale, such developments are associated
    with many technological and economic challenges. Combining established top-down
    lithography with bottom-up self-assembly strategies has the potential to overcome
    those challenges and enable the manipulation of matter with molecular precision.
    One of the most exciting approaches in this regard is to harness the programmability
    of DNA self-assembly to create precise DNA nanostructure masks to be used in the
    lithographic patterning of diverse substrates. DNA nanotechnology has provided
    us with a versatile toolbox for the high-yield synthesis of 2D and 3D nanostructures
    with complex, user-defined shapes at unprecedented molecular accuracy. Consequently,
    the last decade has seen intense research efforts aimed at transferring such DNA
    nanostructure shapes into functional organic and inorganic materials and we have
    now arrived at a point where sophisticated molecular lithography approaches utilize
    DNA nanostructure masks for the fabrication of plasmonic surfaces for metamaterials
    and sensing applications. This review summarizes how the spatial information of
    such DNA nanostructure masks can be transferred into various organic and inorganic
    materials through selective etching and deposition steps. The review also discusses
    recent developments toward all-purpose molecular lithography schemes and highlights
    promising extensions of the discussed methods toward new materials systems and
    application fields.</jats:p>@eng"
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Adrian Clemens
      foaf_name: Keller, Adrian Clemens
      foaf_surname: Keller
      foaf_workInfoHomepage: http://www.librecat.org/personId=48864
    orcid: 0000-0001-7139-3110
  - foaf_Person:
      foaf_givenName: Veikko
      foaf_name: Linko, Veikko
      foaf_surname: Linko
  bibo_doi: 10.1088/1361-6463/ae5667
  dct_date: 2026^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/0022-3727
  - http://id.crossref.org/issn/1361-6463
  dct_language: eng
  dct_publisher: IOP Publishing@
  dct_title: 'Molecular lithography with DNA nanostructures: Methods and applications@'
...