---
_id: '65108'
abstract:
- lang: eng
  text: "<jats:title>Abstract</jats:title>\r\n                  <jats:p>Lithographic
    surface patterning is a cornerstone of modern materials and device fabrication.
    Although the available lithography techniques are constantly being advanced to
    push the feature sizes down to the few-nanometer scale, such developments are
    associated with many technological and economic challenges. Combining established
    top-down lithography with bottom-up self-assembly strategies has the potential
    to overcome those challenges and enable the manipulation of matter with molecular
    precision. One of the most exciting approaches in this regard is to harness the
    programmability of DNA self-assembly to create precise DNA nanostructure masks
    to be used in the lithographic patterning of diverse substrates. DNA nanotechnology
    has provided us with a versatile toolbox for the high-yield synthesis of 2D and
    3D nanostructures with complex, user-defined shapes at unprecedented molecular
    accuracy. Consequently, the last decade has seen intense research efforts aimed
    at transferring such DNA nanostructure shapes into functional organic and inorganic
    materials and we have now arrived at a point where sophisticated molecular lithography
    approaches utilize DNA nanostructure masks for the fabrication of plasmonic surfaces
    for metamaterials and sensing applications. This review summarizes how the spatial
    information of such DNA nanostructure masks can be transferred into various organic
    and inorganic materials through selective etching and deposition steps. The review
    also discusses recent developments toward all-purpose molecular lithography schemes
    and highlights promising extensions of the discussed methods toward new materials
    systems and application fields.</jats:p>"
author:
- first_name: Adrian Clemens
  full_name: Keller, Adrian Clemens
  id: '48864'
  last_name: Keller
  orcid: 0000-0001-7139-3110
- first_name: Veikko
  full_name: Linko, Veikko
  last_name: Linko
citation:
  ama: 'Keller AC, Linko V. Molecular lithography with DNA nanostructures: Methods
    and applications. <i>Journal of Physics D: Applied Physics</i>. Published online
    2026. doi:<a href="https://doi.org/10.1088/1361-6463/ae5667">10.1088/1361-6463/ae5667</a>'
  apa: 'Keller, A. C., &#38; Linko, V. (2026). Molecular lithography with DNA nanostructures:
    Methods and applications. <i>Journal of Physics D: Applied Physics</i>. <a href="https://doi.org/10.1088/1361-6463/ae5667">https://doi.org/10.1088/1361-6463/ae5667</a>'
  bibtex: '@article{Keller_Linko_2026, title={Molecular lithography with DNA nanostructures:
    Methods and applications}, DOI={<a href="https://doi.org/10.1088/1361-6463/ae5667">10.1088/1361-6463/ae5667</a>},
    journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Keller,
    Adrian Clemens and Linko, Veikko}, year={2026} }'
  chicago: 'Keller, Adrian Clemens, and Veikko Linko. “Molecular Lithography with
    DNA Nanostructures: Methods and Applications.” <i>Journal of Physics D: Applied
    Physics</i>, 2026. <a href="https://doi.org/10.1088/1361-6463/ae5667">https://doi.org/10.1088/1361-6463/ae5667</a>.'
  ieee: 'A. C. Keller and V. Linko, “Molecular lithography with DNA nanostructures:
    Methods and applications,” <i>Journal of Physics D: Applied Physics</i>, 2026,
    doi: <a href="https://doi.org/10.1088/1361-6463/ae5667">10.1088/1361-6463/ae5667</a>.'
  mla: 'Keller, Adrian Clemens, and Veikko Linko. “Molecular Lithography with DNA
    Nanostructures: Methods and Applications.” <i>Journal of Physics D: Applied Physics</i>,
    IOP Publishing, 2026, doi:<a href="https://doi.org/10.1088/1361-6463/ae5667">10.1088/1361-6463/ae5667</a>.'
  short: 'A.C. Keller, V. Linko, Journal of Physics D: Applied Physics (2026).'
date_created: 2026-03-25T07:43:24Z
date_updated: 2026-03-25T07:44:52Z
department:
- _id: '302'
doi: 10.1088/1361-6463/ae5667
language:
- iso: eng
publication: 'Journal of Physics D: Applied Physics'
publication_identifier:
  issn:
  - 0022-3727
  - 1361-6463
publication_status: published
publisher: IOP Publishing
status: public
title: 'Molecular lithography with DNA nanostructures: Methods and applications'
type: journal_article
user_id: '48864'
year: '2026'
...