Towards Single‐Crystalline DNA Origami Lattices on Silicon Wafers for Bottom‐Up Nanofabrication Järvinen, Heini Parikka, Johannes M. Rajapaksha, R. P. Thiwangi N. Keller, Adrian Clemens Toppari, J. Jussi <jats:p>In recent years, nanostructures assembled by DNA have found promising applications in optics, medicine, and sensing. DNA origami in particular provides unique self‐assembly properties, not only enabling a vast variety of functionalization schemes but also presenting a promising route to fabricate large‐scale, bottom‐up nanostructured arrays. This approach has comparable precision to electron beam lithography but avoids slow and expensive patterning steps. However, self‐assembly of lattices with high order and well‐defined periodicity requires careful tuning of the deposition parameters and interactions involved, which has been done mostly on mica so far. As mica is not compatible with standard microfabrication processes, we investigate here the assembly of DNA origami lattices on the most general microfabrication material, that is, silicon wafers, which has turned out to be rather challenging. We study how the forming of polycrystalline 2D‐fishnet‐type lattices is influenced by different incubation conditions and strengths of the origami–origami and origami‐surface interactions, with the aim to create large‐scale single‐crystalline lattices. The lattices are characterized by atomic force microscopy and analyzed for precision of formation, achievable domain size, and surface coverage of well‐formed lattices. Thanks to the silicon substrate, these DNA origami lattices can be further combined with traditional microfabrication processes to turn them, for example, into metamaterials with novel optical properties.</jats:p> Wiley 2026 info:eu-repo/semantics/article doc-type:article text http://purl.org/coar/resource_type/c_6501 https://ris.uni-paderborn.de/record/65490 Järvinen H, Parikka JM, Rajapaksha RPTN, Keller AC, Toppari JJ. Towards Single‐Crystalline DNA Origami Lattices on Silicon Wafers for Bottom‐Up Nanofabrication. <i>Small Structures</i>. 2026;7(4). doi:<a href="https://doi.org/10.1002/sstr.202500813">10.1002/sstr.202500813</a> eng info:eu-repo/semantics/altIdentifier/doi/10.1002/sstr.202500813 info:eu-repo/semantics/altIdentifier/issn/2688-4062 info:eu-repo/semantics/altIdentifier/issn/2688-4062 info:eu-repo/semantics/closedAccess