TY - JOUR AU - Zolatanosha, Viktoryia AU - Reuter, Dirk ID - 7019 IS - 2 JF - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena SN - 2166-2746 TI - Site-controlled droplet epitaxy of GaAs quantum dots by deposition through shadow masks VL - 36 ER -