---
res:
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: M.
      foaf_name: Mehta, M.
      foaf_surname: Mehta
  - foaf_Person:
      foaf_givenName: M.
      foaf_name: Ruth, M.
      foaf_surname: Ruth
  - foaf_Person:
      foaf_givenName: K. A.
      foaf_name: Piegdon, K. A.
      foaf_surname: Piegdon
  - foaf_Person:
      foaf_givenName: D.
      foaf_name: Krix, D.
      foaf_surname: Krix
  - foaf_Person:
      foaf_givenName: H.
      foaf_name: Nienhaus, H.
      foaf_surname: Nienhaus
  - foaf_Person:
      foaf_givenName: Cedrik
      foaf_name: Meier, Cedrik
      foaf_surname: Meier
      foaf_workInfoHomepage: http://www.librecat.org/personId=20798
    orcid: https://orcid.org/0000-0002-3787-3572
  bibo_doi: 10.1116/1.3186528
  bibo_issue: '5'
  bibo_volume: 27
  dct_date: 2009^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/1071-1023
  dct_language: eng
  dct_publisher: American Vacuum Society@
  dct_title: Inductively coupled plasma reactive ion etching of bulk ZnO single crystal
    and molecular beam epitaxy grown ZnO films@
...