[{"date_updated":"2022-01-06T07:03:39Z","doi":"10.1116/1.3186528","language":[{"iso":"eng"}],"title":"Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films","department":[{"_id":"15"},{"_id":"230"},{"_id":"287"},{"_id":"35"}],"publication_status":"published","publication_identifier":{"issn":["1071-1023"]},"_id":"7497","intvolume":" 27","article_number":"2097","issue":"5","citation":{"bibtex":"@article{Mehta_Ruth_Piegdon_Krix_Nienhaus_Meier_2009, title={Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films}, volume={27}, DOI={10.1116/1.3186528}, number={52097}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, publisher={American Vacuum Society}, author={Mehta, M. and Ruth, M. and Piegdon, K. A. and Krix, D. and Nienhaus, H. and Meier, Cedrik}, year={2009} }","mla":"Mehta, M., et al. “Inductively Coupled Plasma Reactive Ion Etching of Bulk ZnO Single Crystal and Molecular Beam Epitaxy Grown ZnO Films.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, no. 5, 2097, American Vacuum Society, 2009, doi:10.1116/1.3186528.","chicago":"Mehta, M., M. Ruth, K. A. Piegdon, D. Krix, H. Nienhaus, and Cedrik Meier. “Inductively Coupled Plasma Reactive Ion Etching of Bulk ZnO Single Crystal and Molecular Beam Epitaxy Grown ZnO Films.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27, no. 5 (2009). https://doi.org/10.1116/1.3186528.","apa":"Mehta, M., Ruth, M., Piegdon, K. A., Krix, D., Nienhaus, H., & Meier, C. (2009). Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27(5). https://doi.org/10.1116/1.3186528","ama":"Mehta M, Ruth M, Piegdon KA, Krix D, Nienhaus H, Meier C. Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2009;27(5). doi:10.1116/1.3186528","ieee":"M. Mehta, M. Ruth, K. A. Piegdon, D. Krix, H. Nienhaus, and C. Meier, “Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, no. 5, 2009.","short":"M. Mehta, M. Ruth, K.A. Piegdon, D. Krix, H. Nienhaus, C. Meier, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27 (2009)."},"year":"2009","type":"journal_article","user_id":"20798","publication":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures","publisher":"American Vacuum Society","author":[{"last_name":"Mehta","first_name":"M.","full_name":"Mehta, M."},{"full_name":"Ruth, M.","first_name":"M.","last_name":"Ruth"},{"full_name":"Piegdon, K. A.","first_name":"K. A.","last_name":"Piegdon"},{"last_name":"Krix","first_name":"D.","full_name":"Krix, D."},{"first_name":"H.","full_name":"Nienhaus, H.","last_name":"Nienhaus"},{"last_name":"Meier","id":"20798","first_name":"Cedrik","orcid":"https://orcid.org/0000-0002-3787-3572","full_name":"Meier, Cedrik"}],"volume":27,"date_created":"2019-02-04T14:44:44Z","status":"public"}]