TY - JOUR AU - Reuter, D. AU - Riedesel, C. AU - Schafmeister, P. AU - Meier, Cedrik AU - Wieck, A. D. ID - 7683 IS - 3 JF - Applied Physics Letters SN - 0003-6951 TI - Fabrication of high-quality two-dimensional electron gases by overgrowth of focused-ion-beam-doped AlxGa1−xAs VL - 82 ER -