[{"title":"Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As","author":[{"full_name":"Reuter, Dirk","first_name":"Dirk","id":"37763","last_name":"Reuter"},{"last_name":"Riedesel","full_name":"Riedesel, C.","first_name":"C."},{"last_name":"Wieck","full_name":"Wieck, A. D.","first_name":"A. D."}],"doi":"10.1116/1.2217975","citation":{"short":"D. Reuter, C. Riedesel, A.D. Wieck, Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures (2006).","bibtex":"@article{Reuter_Riedesel_Wieck_2006, title={Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As}, DOI={<a href=\"https://doi.org/10.1116/1.2217975\">10.1116/1.2217975</a>}, number={1863}, journal={Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures}, author={Reuter, Dirk and Riedesel, C. and Wieck, A. D.}, year={2006} }","mla":"Reuter, Dirk, et al. “Fabrication of Submicrometer Patterned Two-Dimensional Electron Gases by Overgrowth of Focused Ion Beam Doped Al[Sub x]Ga[Sub 1−x]As.” <i>Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures</i>, 1863, 2006, doi:<a href=\"https://doi.org/10.1116/1.2217975\">10.1116/1.2217975</a>.","ieee":"D. Reuter, C. Riedesel, and A. D. Wieck, “Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As,” <i>Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures</i>, 2006.","chicago":"Reuter, Dirk, C. Riedesel, and A. D. Wieck. “Fabrication of Submicrometer Patterned Two-Dimensional Electron Gases by Overgrowth of Focused Ion Beam Doped Al[Sub x]Ga[Sub 1−x]As.” <i>Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures</i>, 2006. <a href=\"https://doi.org/10.1116/1.2217975\">https://doi.org/10.1116/1.2217975</a>.","apa":"Reuter, D., Riedesel, C., &#38; Wieck, A. D. (2006). Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As. <i>Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures</i>. <a href=\"https://doi.org/10.1116/1.2217975\">https://doi.org/10.1116/1.2217975</a>","ama":"Reuter D, Riedesel C, Wieck AD. Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As. <i>Journal of Vacuum Science &#38; Technology B: Microelectronics and Nanometer Structures</i>. 2006. doi:<a href=\"https://doi.org/10.1116/1.2217975\">10.1116/1.2217975</a>"},"publication_status":"published","user_id":"42514","department":[{"_id":"15"},{"_id":"230"}],"date_created":"2019-03-27T08:24:33Z","publication":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures","language":[{"iso":"eng"}],"publication_identifier":{"issn":["1071-1023"]},"type":"journal_article","year":"2006","status":"public","_id":"8657","article_number":"1863","date_updated":"2022-01-06T07:03:58Z"}]