Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As

article Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As published Dirk Reuter author 37763 C. Riedesel author A. D. Wieck author 15 department 230 department 2006 eng Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 1071-102310.1116/1.2217975 @article{Reuter_Riedesel_Wieck_2006, title={Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As}, DOI={<a href="https://doi.org/10.1116/1.2217975">10.1116/1.2217975</a>}, number={1863}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, author={Reuter, Dirk and Riedesel, C. and Wieck, A. D.}, year={2006} } Reuter D, Riedesel C, Wieck AD. Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2006. doi:<a href="https://doi.org/10.1116/1.2217975">10.1116/1.2217975</a> Reuter, Dirk, et al. “Fabrication of Submicrometer Patterned Two-Dimensional Electron Gases by Overgrowth of Focused Ion Beam Doped Al[Sub x]Ga[Sub 1−x]As.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1863, 2006, doi:<a href="https://doi.org/10.1116/1.2217975">10.1116/1.2217975</a>. Reuter, Dirk, C. Riedesel, and A. D. Wieck. “Fabrication of Submicrometer Patterned Two-Dimensional Electron Gases by Overgrowth of Focused Ion Beam Doped Al[Sub x]Ga[Sub 1−x]As.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2006. <a href="https://doi.org/10.1116/1.2217975">https://doi.org/10.1116/1.2217975</a>. D. Reuter, C. Riedesel, A.D. Wieck, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (2006). D. Reuter, C. Riedesel, and A. D. Wieck, “Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2006. Reuter, D., Riedesel, C., & Wieck, A. D. (2006). Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. <a href="https://doi.org/10.1116/1.2217975">https://doi.org/10.1116/1.2217975</a> 86572019-03-27T08:24:33Z2022-01-06T07:03:58Z