{"doi":"10.1063/1.1563032","user_id":"42514","_id":"8720","language":[{"iso":"eng"}],"page":"6100-6106","date_updated":"2022-01-06T07:03:59Z","publication_status":"published","publication_identifier":{"issn":["0021-8979","1089-7550"]},"author":[{"last_name":"Meier","first_name":"Cedrik","full_name":"Meier, Cedrik"},{"full_name":"Reuter, Dirk","last_name":"Reuter","first_name":"Dirk","id":"37763"},{"first_name":"Christof","last_name":"Riedesel","full_name":"Riedesel, Christof"},{"full_name":"Wieck, Andreas D.","first_name":"Andreas D.","last_name":"Wieck"}],"year":"2003","title":"Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures","status":"public","department":[{"_id":"15"},{"_id":"230"}],"type":"journal_article","date_created":"2019-03-28T14:54:53Z","citation":{"ama":"Meier C, Reuter D, Riedesel C, Wieck AD. Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures. <i>Journal of Applied Physics</i>. 2003:6100-6106. doi:<a href=\"https://doi.org/10.1063/1.1563032\">10.1063/1.1563032</a>","bibtex":"@article{Meier_Reuter_Riedesel_Wieck_2003, title={Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures}, DOI={<a href=\"https://doi.org/10.1063/1.1563032\">10.1063/1.1563032</a>}, journal={Journal of Applied Physics}, author={Meier, Cedrik and Reuter, Dirk and Riedesel, Christof and Wieck, Andreas D.}, year={2003}, pages={6100–6106} }","mla":"Meier, Cedrik, et al. “Fabrication of Two-Dimensional Electron Systems by Focused Ion Beam Doping of III/V Semiconductor Heterostructures.” <i>Journal of Applied Physics</i>, 2003, pp. 6100–06, doi:<a href=\"https://doi.org/10.1063/1.1563032\">10.1063/1.1563032</a>.","chicago":"Meier, Cedrik, Dirk Reuter, Christof Riedesel, and Andreas D. Wieck. “Fabrication of Two-Dimensional Electron Systems by Focused Ion Beam Doping of III/V Semiconductor Heterostructures.” <i>Journal of Applied Physics</i>, 2003, 6100–6106. <a href=\"https://doi.org/10.1063/1.1563032\">https://doi.org/10.1063/1.1563032</a>.","short":"C. Meier, D. Reuter, C. Riedesel, A.D. Wieck, Journal of Applied Physics (2003) 6100–6106.","apa":"Meier, C., Reuter, D., Riedesel, C., &#38; Wieck, A. D. (2003). Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures. <i>Journal of Applied Physics</i>, 6100–6106. <a href=\"https://doi.org/10.1063/1.1563032\">https://doi.org/10.1063/1.1563032</a>","ieee":"C. Meier, D. Reuter, C. Riedesel, and A. D. Wieck, “Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures,” <i>Journal of Applied Physics</i>, pp. 6100–6106, 2003."},"publication":"Journal of Applied Physics"}