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<titleInfo><title>Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures</title></titleInfo>


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  <namePart type="given">Cedrik</namePart>
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  <namePart type="given">Dirk</namePart>
  <namePart type="family">Reuter</namePart>
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  <namePart type="given">Christof</namePart>
  <namePart type="family">Riedesel</namePart>
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  <namePart type="given">Andreas D.</namePart>
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<originInfo><dateIssued encoding="w3cdtf">2003</dateIssued>
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<relatedItem type="host"><titleInfo><title>Journal of Applied Physics</title></titleInfo>
  <identifier type="issn">0021-8979</identifier>
  <identifier type="issn">1089-7550</identifier><identifier type="doi">10.1063/1.1563032</identifier>
<part><extent unit="pages">6100-6106</extent>
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<ieee>C. Meier, D. Reuter, C. Riedesel, and A. D. Wieck, “Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures,” &lt;i&gt;Journal of Applied Physics&lt;/i&gt;, pp. 6100–6106, 2003.</ieee>
<apa>Meier, C., Reuter, D., Riedesel, C., &amp;#38; Wieck, A. D. (2003). Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures. &lt;i&gt;Journal of Applied Physics&lt;/i&gt;, 6100–6106. &lt;a href=&quot;https://doi.org/10.1063/1.1563032&quot;&gt;https://doi.org/10.1063/1.1563032&lt;/a&gt;</apa>
<short>C. Meier, D. Reuter, C. Riedesel, A.D. Wieck, Journal of Applied Physics (2003) 6100–6106.</short>
<chicago>Meier, Cedrik, Dirk Reuter, Christof Riedesel, and Andreas D. Wieck. “Fabrication of Two-Dimensional Electron Systems by Focused Ion Beam Doping of III/V Semiconductor Heterostructures.” &lt;i&gt;Journal of Applied Physics&lt;/i&gt;, 2003, 6100–6106. &lt;a href=&quot;https://doi.org/10.1063/1.1563032&quot;&gt;https://doi.org/10.1063/1.1563032&lt;/a&gt;.</chicago>
<mla>Meier, Cedrik, et al. “Fabrication of Two-Dimensional Electron Systems by Focused Ion Beam Doping of III/V Semiconductor Heterostructures.” &lt;i&gt;Journal of Applied Physics&lt;/i&gt;, 2003, pp. 6100–06, doi:&lt;a href=&quot;https://doi.org/10.1063/1.1563032&quot;&gt;10.1063/1.1563032&lt;/a&gt;.</mla>
<bibtex>@article{Meier_Reuter_Riedesel_Wieck_2003, title={Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures}, DOI={&lt;a href=&quot;https://doi.org/10.1063/1.1563032&quot;&gt;10.1063/1.1563032&lt;/a&gt;}, journal={Journal of Applied Physics}, author={Meier, Cedrik and Reuter, Dirk and Riedesel, Christof and Wieck, Andreas D.}, year={2003}, pages={6100–6106} }</bibtex>
<ama>Meier C, Reuter D, Riedesel C, Wieck AD. Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures. &lt;i&gt;Journal of Applied Physics&lt;/i&gt;. 2003:6100-6106. doi:&lt;a href=&quot;https://doi.org/10.1063/1.1563032&quot;&gt;10.1063/1.1563032&lt;/a&gt;</ama>
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