@article{8768,
  author       = {{Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D}},
  issn         = {{0268-1242}},
  journal      = {{Semiconductor Science and Technology}},
  pages        = {{603--607}},
  title        = {{{Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography}}},
  doi          = {{10.1088/0268-1242/16/7/314}},
  year         = {{2002}},
}