article published Dirk Reuter author 37763 D Kähler author U Kunze author A D Wieck author 15 department 230 department 2002 eng 0268-1242 1361-664110.1088/0268-1242/16/7/314 603-607 Reuter, D., Kähler, D., Kunze, U., &#38; Wieck, A. D. (2002). Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography. <i>Semiconductor Science and Technology</i>, 603–607. <a href="https://doi.org/10.1088/0268-1242/16/7/314">https://doi.org/10.1088/0268-1242/16/7/314</a> D. Reuter, D. Kähler, U. Kunze, and A. D. Wieck, “Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography,” <i>Semiconductor Science and Technology</i>, pp. 603–607, 2002. Reuter, Dirk, D Kähler, U Kunze, and A D Wieck. “Layer-Compensated Selectively Doped AlxGa1-XAs/GaAs Heterostructures as a Base Material for Nanolithography.” <i>Semiconductor Science and Technology</i>, 2002, 603–7. <a href="https://doi.org/10.1088/0268-1242/16/7/314">https://doi.org/10.1088/0268-1242/16/7/314</a>. D. Reuter, D. Kähler, U. Kunze, A.D. Wieck, Semiconductor Science and Technology (2002) 603–607. Reuter, Dirk, et al. “Layer-Compensated Selectively Doped AlxGa1-XAs/GaAs Heterostructures as a Base Material for Nanolithography.” <i>Semiconductor Science and Technology</i>, 2002, pp. 603–07, doi:<a href="https://doi.org/10.1088/0268-1242/16/7/314">10.1088/0268-1242/16/7/314</a>. Reuter D, Kähler D, Kunze U, Wieck AD. Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography. <i>Semiconductor Science and Technology</i>. 2002:603-607. doi:<a href="https://doi.org/10.1088/0268-1242/16/7/314">10.1088/0268-1242/16/7/314</a> @article{Reuter_Kähler_Kunze_Wieck_2002, title={Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography}, DOI={<a href="https://doi.org/10.1088/0268-1242/16/7/314">10.1088/0268-1242/16/7/314</a>}, journal={Semiconductor Science and Technology}, author={Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D}, year={2002}, pages={603–607} } 87682019-04-01T07:56:38Z2022-01-06T07:04:00Z