@article{8772, author = {{Versen, M and Klehn, B and Kunze, U and Reuter, Dirk and Wieck, A.D}}, issn = {{0304-3991}}, journal = {{Ultramicroscopy}}, pages = {{159--163}}, title = {{{Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope}}}, doi = {{10.1016/s0304-3991(99)00127-8}}, year = {{2002}}, }