{"department":[{"_id":"15"},{"_id":"230"}],"status":"public","author":[{"full_name":"Versen, M","last_name":"Versen","first_name":"M"},{"last_name":"Klehn","full_name":"Klehn, B","first_name":"B"},{"first_name":"U","last_name":"Kunze","full_name":"Kunze, U"},{"id":"37763","first_name":"Dirk","last_name":"Reuter","full_name":"Reuter, Dirk"},{"full_name":"Wieck, A.D","last_name":"Wieck","first_name":"A.D"}],"year":"2002","date_created":"2019-04-01T08:09:48Z","page":"159-163","publication_status":"published","language":[{"iso":"eng"}],"user_id":"42514","type":"journal_article","doi":"10.1016/s0304-3991(99)00127-8","publication_identifier":{"issn":["0304-3991"]},"date_updated":"2022-01-06T07:04:00Z","_id":"8772","title":"Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope","citation":{"bibtex":"@article{Versen_Klehn_Kunze_Reuter_Wieck_2002, title={Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope}, DOI={10.1016/s0304-3991(99)00127-8}, journal={Ultramicroscopy}, author={Versen, M and Klehn, B and Kunze, U and Reuter, Dirk and Wieck, A.D}, year={2002}, pages={159–163} }","ama":"Versen M, Klehn B, Kunze U, Reuter D, Wieck A. Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope. Ultramicroscopy. 2002:159-163. doi:10.1016/s0304-3991(99)00127-8","short":"M. Versen, B. Klehn, U. Kunze, D. Reuter, A.. Wieck, Ultramicroscopy (2002) 159–163.","ieee":"M. Versen, B. Klehn, U. Kunze, D. Reuter, and A. . Wieck, “Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope,” Ultramicroscopy, pp. 159–163, 2002.","apa":"Versen, M., Klehn, B., Kunze, U., Reuter, D., & Wieck, A. . (2002). Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope. Ultramicroscopy, 159–163. https://doi.org/10.1016/s0304-3991(99)00127-8","mla":"Versen, M., et al. “Nanoscale Devices Fabricated by Direct Machining of GaAs with an Atomic Force Microscope.” Ultramicroscopy, 2002, pp. 159–63, doi:10.1016/s0304-3991(99)00127-8.","chicago":"Versen, M, B Klehn, U Kunze, Dirk Reuter, and A.D Wieck. “Nanoscale Devices Fabricated by Direct Machining of GaAs with an Atomic Force Microscope.” Ultramicroscopy, 2002, 159–63. https://doi.org/10.1016/s0304-3991(99)00127-8."},"publication":"Ultramicroscopy"}