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1 Publication
2014 | Book Chapter | LibreCat-ID: 39501
@inbook{Hilleringmann_2014, place={Wiesbaden}, title={Lithografie}, DOI={10.1007/978-3-8348-2085-3_4}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2014} }
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