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1 Publication
2011 | Conference Paper | LibreCat-ID: 4546
Characterization of SiON integrated waveguides via FTIR and AFM measurements
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011.
LibreCat
| DOI
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011.