Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).

We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.

1 Publication

2011 | Conference Paper | LibreCat-ID: 4546
Characterization of SiON integrated waveguides via FTIR and AFM measurements
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011.
LibreCat | DOI

Filters and Search Terms



Filter Publications

Display / Sort

Export / Embed