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12 Publications


2002 | Journal Article | LibreCat-ID: 8747
Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography
D. Reuter, D. Kähler, U. Kunze, A.D. Wieck, Semiconductor Science and Technology (2002) 603–607.
LibreCat | DOI
 

2002 | Journal Article | LibreCat-ID: 8768
Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography
D. Reuter, D. Kähler, U. Kunze, A.D. Wieck, Semiconductor Science and Technology (2002) 603–607.
LibreCat | DOI
 

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