Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).
We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.
91 Publications
1993 | Conference Paper | LibreCat-ID: 39913
Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results
U. Hilleringmann, S. Adam, K. Goser, in: ESSDtRC’93, 1993.
LibreCat
U. Hilleringmann, S. Adam, K. Goser, in: ESSDtRC’93, 1993.