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1601 Publications


2013 | Journal Article | LibreCat-ID: 22584
Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition
V.-S. Dang, H. Parala, J.H. Kim, K. Xu, N.B. Srinivasan, E. Edengeiser, M. Havenith, A.D. Wieck, M.T. de los Arcos de Pedro, Roland.A. Fischer, A. Devi, Physica Status Solidi (a) (2013) 416–424.
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22589
MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, D. Rogalla, H.-W. Becker, A. Devi, R.A. Fischer, Physica Status Solidi (a) (2013) 260–266.
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22596
Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties
K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, M.T. de los Arcos de Pedro, H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22593
Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, V. Gwildies, M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, R.A. Fischer, Surface and Coatings Technology (2013) 130–136.
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22594
Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum
A. Will, M.T. de los Arcos de Pedro, C. Corbella, A. Hecimovic, P.D. Machura, J. Winter, A. von Keudell, Journal of Physics D: Applied Physics (2013).
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22591
Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22595
Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity
J. Winter, A. Hecimovic, M.T. de los Arcos de Pedro, M. Böke, V. Schulz-von der Gathen, Journal of Physics D: Applied Physics (2013).
LibreCat | DOI
 

2013 | Journal Article | LibreCat-ID: 22592
Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.
LibreCat | DOI
 

2013 | Book | LibreCat-ID: 39391
Abstimmung in Bewegung. Intersubjektivität im Tango Argentino
M. Haller, Abstimmung in Bewegung. Intersubjektivität im Tango Argentino, Transcript, 2013.
LibreCat
 

2013 | Book | LibreCat-ID: 37716
(Erzählte) Zeit des Wartens. Semantiken und Narrative eines temporalen Phänomens.
N. Benz, (Erzählte) Zeit des Wartens. Semantiken und Narrative eines temporalen Phänomens., Vandenhoeck & Ruprecht, Göttingen, 2013.
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