Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges

P.D. Machura, A. Hecimovic, S. Gallian, J. Winter, T. de los Arcos, Plasma Sources Science and Technology (2014).

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Journal Article | Published | English
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Plasma Sources Science and Technology
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065043
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Machura PD, Hecimovic A, Gallian S, Winter J, de los Arcos T. Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology. 2014. doi:10.1088/0963-0252/23/6/065043
Machura, P. D., Hecimovic, A., Gallian, S., Winter, J., & de los Arcos, T. (2014). Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/23/6/065043
@article{Machura_Hecimovic_Gallian_Winter_de los Arcos_2014, title={Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges}, DOI={10.1088/0963-0252/23/6/065043}, number={065043}, journal={Plasma Sources Science and Technology}, author={Machura, P D and Hecimovic, A and Gallian, S and Winter, J and de los Arcos, T}, year={2014} }
Machura, P D, A Hecimovic, S Gallian, J Winter, and T de los Arcos. “Simultaneous Characterization of Static and Induced Magnetic Fields in High Power Impulse Magnetron Sputtering Discharges.” Plasma Sources Science and Technology, 2014. https://doi.org/10.1088/0963-0252/23/6/065043.
P. D. Machura, A. Hecimovic, S. Gallian, J. Winter, and T. de los Arcos, “Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges,” Plasma Sources Science and Technology, 2014.
Machura, P. D., et al. “Simultaneous Characterization of Static and Induced Magnetic Fields in High Power Impulse Magnetron Sputtering Discharges.” Plasma Sources Science and Technology, 065043, 2014, doi:10.1088/0963-0252/23/6/065043.

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