Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges
P.D. Machura, A. Hecimovic, S. Gallian, J. Winter, M.T. de los Arcos de Pedro, Plasma Sources Science and Technology (2014).
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Author
Machura, P D;
Hecimovic, A;
Gallian, S;
Winter, J;
de los Arcos de Pedro, Maria TeresaLibreCat
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Publishing Year
Journal Title
Plasma Sources Science and Technology
Article Number
065043
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Machura PD, Hecimovic A, Gallian S, Winter J, de los Arcos de Pedro MT. Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology. Published online 2014. doi:10.1088/0963-0252/23/6/065043
Machura, P. D., Hecimovic, A., Gallian, S., Winter, J., & de los Arcos de Pedro, M. T. (2014). Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology, Article 065043. https://doi.org/10.1088/0963-0252/23/6/065043
@article{Machura_Hecimovic_Gallian_Winter_de los Arcos de Pedro_2014, title={Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges}, DOI={10.1088/0963-0252/23/6/065043}, number={065043}, journal={Plasma Sources Science and Technology}, author={Machura, P D and Hecimovic, A and Gallian, S and Winter, J and de los Arcos de Pedro, Maria Teresa}, year={2014} }
Machura, P D, A Hecimovic, S Gallian, J Winter, and Maria Teresa de los Arcos de Pedro. “Simultaneous Characterization of Static and Induced Magnetic Fields in High Power Impulse Magnetron Sputtering Discharges.” Plasma Sources Science and Technology, 2014. https://doi.org/10.1088/0963-0252/23/6/065043.
P. D. Machura, A. Hecimovic, S. Gallian, J. Winter, and M. T. de los Arcos de Pedro, “Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges,” Plasma Sources Science and Technology, Art. no. 065043, 2014, doi: 10.1088/0963-0252/23/6/065043.
Machura, P. D., et al. “Simultaneous Characterization of Static and Induced Magnetic Fields in High Power Impulse Magnetron Sputtering Discharges.” Plasma Sources Science and Technology, 065043, 2014, doi:10.1088/0963-0252/23/6/065043.
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