High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
A.P. Ehiasarian, A. Hecimovic, M.T. de los Arcos de Pedro, R. New, V. Schulz-von der Gathen, M. Böke, J. Winter, Applied Physics Letters (2012).
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Journal Article
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| English
Author
Ehiasarian, A. P.;
Hecimovic, A.;
de los Arcos de Pedro, Maria TeresaLibreCat;
New, R.;
Schulz-von der Gathen, V.;
Böke, M.;
Winter, J.
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Publishing Year
Journal Title
Applied Physics Letters
Article Number
114101
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Ehiasarian AP, Hecimovic A, de los Arcos de Pedro MT, et al. High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization. Applied Physics Letters. Published online 2012. doi:10.1063/1.3692172
Ehiasarian, A. P., Hecimovic, A., de los Arcos de Pedro, M. T., New, R., Schulz-von der Gathen, V., Böke, M., & Winter, J. (2012). High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization. Applied Physics Letters, Article 114101. https://doi.org/10.1063/1.3692172
@article{Ehiasarian_Hecimovic_de los Arcos de Pedro_New_Schulz-von der Gathen_Böke_Winter_2012, title={High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization}, DOI={10.1063/1.3692172}, number={114101}, journal={Applied Physics Letters}, author={Ehiasarian, A. P. and Hecimovic, A. and de los Arcos de Pedro, Maria Teresa and New, R. and Schulz-von der Gathen, V. and Böke, M. and Winter, J.}, year={2012} }
Ehiasarian, A. P., A. Hecimovic, Maria Teresa de los Arcos de Pedro, R. New, V. Schulz-von der Gathen, M. Böke, and J. Winter. “High Power Impulse Magnetron Sputtering Discharges: Instabilities and Plasma Self-Organization.” Applied Physics Letters, 2012. https://doi.org/10.1063/1.3692172.
A. P. Ehiasarian et al., “High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization,” Applied Physics Letters, Art. no. 114101, 2012, doi: 10.1063/1.3692172.
Ehiasarian, A. P., et al. “High Power Impulse Magnetron Sputtering Discharges: Instabilities and Plasma Self-Organization.” Applied Physics Letters, 114101, 2012, doi:10.1063/1.3692172.
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