A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD

M. Gebhard, F. Mitschker, C. Hoppe, M. Aghaee, D. Rogalla, M. Creatore, G. Grundmeier, P. Awakowicz, A. Devi, Plasma Processes and Polymers (2018).

Download
No fulltext has been uploaded.
Journal Article | Published | English
Author
; ; ; ; ; ; ; ;
Publishing Year
Journal Title
Plasma Processes and Polymers
Article Number
1700209
ISSN
LibreCat-ID

Cite this

Gebhard M, Mitschker F, Hoppe C, et al. A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers. 2018. doi:10.1002/ppap.201700209
Gebhard, M., Mitschker, F., Hoppe, C., Aghaee, M., Rogalla, D., Creatore, M., … Devi, A. (2018). A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers. https://doi.org/10.1002/ppap.201700209
@article{Gebhard_Mitschker_Hoppe_Aghaee_Rogalla_Creatore_Grundmeier_Awakowicz_Devi_2018, title={A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD}, DOI={10.1002/ppap.201700209}, number={1700209}, journal={Plasma Processes and Polymers}, author={Gebhard, Maximilian and Mitschker, Felix and Hoppe, Christian and Aghaee, Morteza and Rogalla, Detlef and Creatore, Mariadriana and Grundmeier, Guido and Awakowicz, Peter and Devi, Anjana}, year={2018} }
Gebhard, Maximilian, Felix Mitschker, Christian Hoppe, Morteza Aghaee, Detlef Rogalla, Mariadriana Creatore, Guido Grundmeier, Peter Awakowicz, and Anjana Devi. “A Combinatorial Approach to Enhance Barrier Properties of Thin Films on Polymers: Seeding and Capping of PECVD Thin Films by PEALD.” Plasma Processes and Polymers, 2018. https://doi.org/10.1002/ppap.201700209.
M. Gebhard et al., “A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD,” Plasma Processes and Polymers, 2018.
Gebhard, Maximilian, et al. “A Combinatorial Approach to Enhance Barrier Properties of Thin Films on Polymers: Seeding and Capping of PECVD Thin Films by PEALD.” Plasma Processes and Polymers, 1700209, 2018, doi:10.1002/ppap.201700209.

Export

Marked Publications

Open Data LibreCat

Search this title in

Google Scholar