High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development
J. Bürger, H. Venugopal, D. Kool, T. de los Arcos, A. Gonzalez Orive, G. Grundmeier, K. Brassat, J.K.N. Lindner, Advanced Materials Interfaces 9 (2022).
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Journal Article
| Published
| English
Author
Bürger, JuliusLibreCat;
Venugopal, Harikrishnan;
Kool, DanielLibreCat;
de los Arcos, Teresa;
Gonzalez Orive, Alejandro;
Grundmeier, GuidoLibreCat;
Brassat, KatharinaLibreCat;
Lindner, Jörg K.N.
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Journal Title
Advanced Materials Interfaces
Volume
9
Issue
26
Article Number
2200962
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Bürger J, Venugopal H, Kool D, et al. High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development. Advanced Materials Interfaces. 2022;9(26). doi:10.1002/admi.202200962
Bürger, J., Venugopal, H., Kool, D., de los Arcos, T., Gonzalez Orive, A., Grundmeier, G., Brassat, K., & Lindner, J. K. N. (2022). High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development. Advanced Materials Interfaces, 9(26), Article 2200962. https://doi.org/10.1002/admi.202200962
@article{Bürger_Venugopal_Kool_de los Arcos_Gonzalez Orive_Grundmeier_Brassat_Lindner_2022, title={High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development}, volume={9}, DOI={10.1002/admi.202200962}, number={262200962}, journal={Advanced Materials Interfaces}, publisher={Wiley}, author={Bürger, Julius and Venugopal, Harikrishnan and Kool, Daniel and de los Arcos, Teresa and Gonzalez Orive, Alejandro and Grundmeier, Guido and Brassat, Katharina and Lindner, Jörg K.N.}, year={2022} }
Bürger, Julius, Harikrishnan Venugopal, Daniel Kool, Teresa de los Arcos, Alejandro Gonzalez Orive, Guido Grundmeier, Katharina Brassat, and Jörg K.N. Lindner. “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development.” Advanced Materials Interfaces 9, no. 26 (2022). https://doi.org/10.1002/admi.202200962.
J. Bürger et al., “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development,” Advanced Materials Interfaces, vol. 9, no. 26, Art. no. 2200962, 2022, doi: 10.1002/admi.202200962.
Bürger, Julius, et al. “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development.” Advanced Materials Interfaces, vol. 9, no. 26, 2200962, Wiley, 2022, doi:10.1002/admi.202200962.
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