Surface tension and its role for vertical wet etching of silicon
A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012).
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Journal Article
| Published
| English
Author
Brockmeier, A;
Rodriguez, F J Santos;
Harrison, M;
Hilleringmann, UlrichLibreCat
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Journal Title
Journal of Micromechanics and Microengineering
Volume
22
Issue
12
Article Number
125012
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Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering. 2012;22(12). doi:10.1088/0960-1317/22/12/125012
Brockmeier, A., Rodriguez, F. J. S., Harrison, M., & Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering, 22(12), Article 125012. https://doi.org/10.1088/0960-1317/22/12/125012
@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={10.1088/0960-1317/22/12/125012}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} }
Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering 22, no. 12 (2012). https://doi.org/10.1088/0960-1317/22/12/125012.
A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” Journal of Micromechanics and Microengineering, vol. 22, no. 12, Art. no. 125012, 2012, doi: 10.1088/0960-1317/22/12/125012.
Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:10.1088/0960-1317/22/12/125012.
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