Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator
J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A: Physical 137 (2007) 302–307.
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Journal Article
| Published
| English
Author
Jiang, Jianliang;
Hilleringmann, UlrichLibreCat;
Shui, Xiaoping
Department
Keywords
Publishing Year
Journal Title
Sensors and Actuators A: Physical
Volume
137
Issue
2
Page
302-307
ISSN
LibreCat-ID
Cite this
Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. Sensors and Actuators A: Physical. 2007;137(2):302-307. doi:10.1016/j.sna.2007.03.012
Jiang, J., Hilleringmann, U., & Shui, X. (2007). Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. Sensors and Actuators A: Physical, 137(2), 302–307. https://doi.org/10.1016/j.sna.2007.03.012
@article{Jiang_Hilleringmann_Shui_2007, title={Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator}, volume={137}, DOI={10.1016/j.sna.2007.03.012}, number={2}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Jiang, Jianliang and Hilleringmann, Ulrich and Shui, Xiaoping}, year={2007}, pages={302–307} }
Jiang, Jianliang, Ulrich Hilleringmann, and Xiaoping Shui. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” Sensors and Actuators A: Physical 137, no. 2 (2007): 302–7. https://doi.org/10.1016/j.sna.2007.03.012.
J. Jiang, U. Hilleringmann, and X. Shui, “Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator,” Sensors and Actuators A: Physical, vol. 137, no. 2, pp. 302–307, 2007, doi: 10.1016/j.sna.2007.03.012.
Jiang, Jianliang, et al. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” Sensors and Actuators A: Physical, vol. 137, no. 2, Elsevier BV, 2007, pp. 302–07, doi:10.1016/j.sna.2007.03.012.