Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces

T. Riedl, J. Lindner, Physica Status Solidi (A) 211 (2014) 2871–2877.

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Abstract
This paper presents a low‐cost procedure that allows for self‐organized fabrication of periodically arranged, sub‐50 nm diameter, vertical‐sidewall GaAs nanopillars on GaAs surfaces based on nanosphere lithography, and reactive ion etching (RIE). Monodispersed polystyrene (PS) sphere double layers are deposited from a colloidal suspension on pre‐treated, hydrophilized GaAs substrates. Ni is thermally evaporated to act as a hard mask for subsequent RIE. Scanning electron microscopy reveals that the Ni nanoparticles left on the substrate after PS sphere removal have polygon‐shaped in‐plane cross‐sections corresponding to the shape of the double layer mask openings. RIE using SiCl4 at low pressure and high power density leads to the formation of vertical nanopillars with circular to oval cross‐sections, whose diameters are reduced by ∼1/3 compared to those of the Ni nanoparticles. These findings can be explained by plasma‐enhanced surface diffusion and sputtering processes during RIE. The obtained GaAs nanopillars have an average diameter of only ∼23 nm, exhibit an excellent verticality with a sidewall angle of 88.9 ± 0.4° and planar top faces, as visible in transmission electron microscopy images.
Publishing Year
Journal Title
physica status solidi (a)
Volume
211
Issue
12
Page
2871-2877
ISSN
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Riedl T, Lindner J. Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces. physica status solidi (a). 2014;211(12):2871-2877. doi:10.1002/pssa.201431474
Riedl, T., & Lindner, J. (2014). Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces. Physica Status Solidi (A), 211(12), 2871–2877. https://doi.org/10.1002/pssa.201431474
@article{Riedl_Lindner_2014, title={Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces}, volume={211}, DOI={10.1002/pssa.201431474}, number={12}, journal={physica status solidi (a)}, publisher={Wiley}, author={Riedl, Thomas and Lindner, Jörg}, year={2014}, pages={2871–2877} }
Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic Arrays of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” Physica Status Solidi (A) 211, no. 12 (2014): 2871–77. https://doi.org/10.1002/pssa.201431474.
T. Riedl and J. Lindner, “Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces,” physica status solidi (a), vol. 211, no. 12, pp. 2871–2877, 2014.
Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic Arrays of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” Physica Status Solidi (A), vol. 211, no. 12, Wiley, 2014, pp. 2871–77, doi:10.1002/pssa.201431474.
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