Photonic crystal properties of Si and SiO2 nanopillar arrays fabricated by nanosphere lithography and metal-assisted wet-chemical etching

M. Kismann, T. Riedl, X. Wu, T. Wagner, J. Lindner, in: 2018.

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Conference Paper | English
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Conference
EMRS-Fall Meeting 2018
Conference Location
Warsaw (Poland)
Conference Date
2018-09-17 – 2018-09-20
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Kismann M, Riedl T, Wu X, Wagner T, Lindner J. Photonic crystal properties of Si and SiO2 nanopillar arrays fabricated by nanosphere lithography and metal-assisted wet-chemical etching. In: ; 2018.
Kismann, M., Riedl, T., Wu, X., Wagner, T., & Lindner, J. (2018). Photonic crystal properties of Si and SiO2 nanopillar arrays fabricated by nanosphere lithography and metal-assisted wet-chemical etching. Presented at the EMRS-Fall Meeting 2018, Warsaw (Poland).
@inproceedings{Kismann_Riedl_Wu_Wagner_Lindner_2018, title={Photonic crystal properties of Si and SiO2 nanopillar arrays fabricated by nanosphere lithography and metal-assisted wet-chemical etching}, author={Kismann, Michael and Riedl, Thomas and Wu, Xia and Wagner, Thorsten and Lindner, Jörg}, year={2018} }
Kismann, Michael, Thomas Riedl, Xia Wu, Thorsten Wagner, and Jörg Lindner. “Photonic Crystal Properties of Si and SiO2 Nanopillar Arrays Fabricated by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching,” 2018.
M. Kismann, T. Riedl, X. Wu, T. Wagner, and J. Lindner, “Photonic crystal properties of Si and SiO2 nanopillar arrays fabricated by nanosphere lithography and metal-assisted wet-chemical etching,” presented at the EMRS-Fall Meeting 2018, Warsaw (Poland), 2018.
Kismann, Michael, et al. Photonic Crystal Properties of Si and SiO2 Nanopillar Arrays Fabricated by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching. 2018.

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