Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives.

Piezoelectric inertia motors also known as stick-slip motors or (smooth) impact drives use the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In addition to the typical advantages of piezoelectric motors, they are especially suited for miniaturisation due to their simple structure and inherent fine-positioning capability. Originally developed for positioning in microscopy in the 1980s, they have nowadays also found application in mass-produced consumer goods. Recent research results are likely to enable more applications of piezoelectric inertia motors in the future. This contribution gives a critical overview of their historical development, functional principles, and related terminology. The most relevant aspects regarding their design i.e., friction contact, solid state actuator, and electrical excitation are discussed, including aspects of control and simulation. The article closes with an outlook on possible future developments and research perspectives.