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1 Publication


2012 | Journal Article | LibreCat-ID: 22597
Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors
M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker, D. Rogalla, T. de los Arcos, D. Bekermann, D. Barreca, R.A. Fischer, A. Devi, Crystal Growth & Design (2012) 5079–5089.
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