Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors

M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker, D. Rogalla, T. de los Arcos, D. Bekermann, D. Barreca, R.A. Fischer, A. Devi, Crystal Growth & Design (2012) 5079–5089.

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Journal Article | Published | English
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Crystal Growth & Design
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5079-5089
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Banerjee M, Srinivasan NB, Zhu H, et al. Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. Crystal Growth & Design. 2012:5079-5089. doi:10.1021/cg3010147
Banerjee, M., Srinivasan, N. B., Zhu, H., Kim, S. J., Xu, K., Winter, M., … Devi, A. (2012). Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. Crystal Growth & Design, 5079–5089. https://doi.org/10.1021/cg3010147
@article{Banerjee_Srinivasan_Zhu_Kim_Xu_Winter_Becker_Rogalla_de los Arcos_Bekermann_et al._2012, title={Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors}, DOI={10.1021/cg3010147}, journal={Crystal Growth & Design}, author={Banerjee, Manish and Srinivasan, Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos, Teresa and Bekermann, Daniela and et al.}, year={2012}, pages={5079–5089} }
Banerjee, Manish, Nagendra Babu Srinivasan, Huaizhi Zhu, Sun Ja Kim, Ke Xu, Manuela Winter, Hans-Werner Becker, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” Crystal Growth & Design, 2012, 5079–89. https://doi.org/10.1021/cg3010147.
M. Banerjee et al., “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors,” Crystal Growth & Design, pp. 5079–5089, 2012.
Banerjee, Manish, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” Crystal Growth & Design, 2012, pp. 5079–89, doi:10.1021/cg3010147.

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