Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors

Banerjee, M., Srinivasan, N. B., Zhu, H., Kim, S. J., Xu, K., Winter, M., Becker, H.-W., Rogalla, D., de los Arcos de Pedro, M. T., Bekermann, D., Barreca, D., Fischer, R. A., & Devi, A. (2012). Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. Crystal Growth & Design, 5079–5089. https://doi.org/10.1021/cg3010147

@article{Banerjee_Srinivasan_Zhu_Kim_Xu_Winter_Becker_Rogalla_de los Arcos de Pedro_Bekermann_et al._2012, title={Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors}, DOI={10.1021/cg3010147}, journal={Crystal Growth & Design}, author={Banerjee, Manish and Srinivasan, Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos de Pedro, Maria Teresa and Bekermann, Daniela and et al.}, year={2012}, pages={5079–5089} }

Banerjee, Manish, Nagendra Babu Srinivasan, Huaizhi Zhu, Sun Ja Kim, Ke Xu, Manuela Winter, Hans-Werner Becker, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” Crystal Growth & Design, 2012, 5079–89. https://doi.org/10.1021/cg3010147.

M. Banerjee et al., “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors,” Crystal Growth & Design, pp. 5079–5089, 2012, doi: 10.1021/cg3010147.

Banerjee, Manish, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” Crystal Growth & Design, 2012, pp. 5079–89, doi:10.1021/cg3010147.