1/f-Frequency Fluctations and Phase Noise in MEMS Resonators

P. Handel, B. Henning, in: 2004, pp. 88–89.

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Abstract
The classical forms of noise present in the frequency of MEMS resonators have been recently investigated and described in detail. The present paper extends this investigation to 1/f noise. That is of fundamental nature in microelectromechanical systems (MEMS) resonators, and is given by the universal quantum 1/f effect. In recent years new piezoelectric and compound semiconductor materials have been developed along with advanced manufacturing technologies for MEMS including them. These technologies enable the deposition of thin compound semiconductor, or PZT films and their integration into MEMS devices.
Publishing Year
Page
88-89
Conference
28th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE)
Conference Location
Smolenice, Slovakia
Conference Date
17.05.2004 – 19.05.2014
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Handel P, Henning B. 1/f-Frequency Fluctations and Phase Noise in MEMS Resonators. In: ; 2004:88-89.
Handel, P., & Henning, B. (2004). 1/f-Frequency Fluctations and Phase Noise in MEMS Resonators (pp. 88–89). Presented at the 28th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE), Smolenice, Slovakia.
@inproceedings{Handel_Henning_2004, title={1/f-Frequency Fluctations and Phase Noise in MEMS Resonators}, author={Handel, Peter and Henning, Bernd}, year={2004}, pages={88–89} }
Handel, Peter, and Bernd Henning. “1/f-Frequency Fluctations and Phase Noise in MEMS Resonators,” 88–89, 2004.
P. Handel and B. Henning, “1/f-Frequency Fluctations and Phase Noise in MEMS Resonators,” presented at the 28th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE), Smolenice, Slovakia, 2004, pp. 88–89.
Handel, Peter, and Bernd Henning. 1/f-Frequency Fluctations and Phase Noise in MEMS Resonators. 2004, pp. 88–89.

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