Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films

T. de los Arcos, H. Müller, F. Wang, V.R. Damerla, C. Hoppe, C. Weinberger, M. Tiemann, G. Grundmeier, Vibrational Spectroscopy (2021).

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Journal Article | Published | English
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Vibrational Spectroscopy
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103256
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de los Arcos T, Müller H, Wang F, et al. Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films. Vibrational Spectroscopy. 2021. doi:10.1016/j.vibspec.2021.103256
de los Arcos, T., Müller, H., Wang, F., Damerla, V. R., Hoppe, C., Weinberger, C., … Grundmeier, G. (2021). Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films. Vibrational Spectroscopy. https://doi.org/10.1016/j.vibspec.2021.103256
@article{de los Arcos_Müller_Wang_Damerla_Hoppe_Weinberger_Tiemann_Grundmeier_2021, title={Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films}, DOI={10.1016/j.vibspec.2021.103256}, number={103256}, journal={Vibrational Spectroscopy}, author={de los Arcos, Teresa and Müller, Hendrik and Wang, Fuzeng and Damerla, Varun Raj and Hoppe, Christian and Weinberger, Christian and Tiemann, Michael and Grundmeier, Guido}, year={2021} }
Arcos, Teresa de los, Hendrik Müller, Fuzeng Wang, Varun Raj Damerla, Christian Hoppe, Christian Weinberger, Michael Tiemann, and Guido Grundmeier. “Review of Infrared Spectroscopy Techniques for the Determination of Internal Structure in Thin SiO2 Films.” Vibrational Spectroscopy, 2021. https://doi.org/10.1016/j.vibspec.2021.103256.
T. de los Arcos et al., “Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films,” Vibrational Spectroscopy, 2021.
de los Arcos, Teresa, et al. “Review of Infrared Spectroscopy Techniques for the Determination of Internal Structure in Thin SiO2 Films.” Vibrational Spectroscopy, 103256, 2021, doi:10.1016/j.vibspec.2021.103256.

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