Electric potential screening on metal targets submitted to reactive sputtering

C. Corbella, A. Marcak, A. von Keudell, T. de los Arcos, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (2016).

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Journal Article | Published | English
Author
Corbella, Carles; Marcak, Adrian; von Keudell, Achim; de los Arcos, Teresa
Publishing Year
Journal Title
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Article Number
021307
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Corbella C, Marcak A, von Keudell A, de los Arcos T. Electric potential screening on metal targets submitted to reactive sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 2016. doi:10.1116/1.4972566
Corbella, C., Marcak, A., von Keudell, A., & de los Arcos, T. (2016). Electric potential screening on metal targets submitted to reactive sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. https://doi.org/10.1116/1.4972566
@article{Corbella_Marcak_von Keudell_de los Arcos_2016, title={Electric potential screening on metal targets submitted to reactive sputtering}, DOI={10.1116/1.4972566}, number={021307}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, author={Corbella, Carles and Marcak, Adrian and von Keudell, Achim and de los Arcos, Teresa}, year={2016} }
Corbella, Carles, Adrian Marcak, Achim von Keudell, and Teresa de los Arcos. “Electric Potential Screening on Metal Targets Submitted to Reactive Sputtering.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2016. https://doi.org/10.1116/1.4972566.
C. Corbella, A. Marcak, A. von Keudell, and T. de los Arcos, “Electric potential screening on metal targets submitted to reactive sputtering,” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2016.
Corbella, Carles, et al. “Electric Potential Screening on Metal Targets Submitted to Reactive Sputtering.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 021307, 2016, doi:10.1116/1.4972566.

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