Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics
V. Layes, S. Monje, C. Corbella, V. Schulz-von der Gathen, A. von Keudell, M.T. de los Arcos de Pedro, Journal of Applied Physics (2017).
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| English
Author
Layes, Vincent;
Monje, Sascha;
Corbella, Carles;
Schulz-von der Gathen, Volker;
von Keudell, Achim;
de los Arcos de Pedro, Maria TeresaLibreCat
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Publishing Year
Journal Title
Journal of Applied Physics
Article Number
171912
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Layes V, Monje S, Corbella C, Schulz-von der Gathen V, von Keudell A, de los Arcos de Pedro MT. Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics. Journal of Applied Physics. Published online 2017. doi:10.1063/1.4977820
Layes, V., Monje, S., Corbella, C., Schulz-von der Gathen, V., von Keudell, A., & de los Arcos de Pedro, M. T. (2017). Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics. Journal of Applied Physics, Article 171912. https://doi.org/10.1063/1.4977820
@article{Layes_Monje_Corbella_Schulz-von der Gathen_von Keudell_de los Arcos de Pedro_2017, title={Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics}, DOI={10.1063/1.4977820}, number={171912}, journal={Journal of Applied Physics}, author={Layes, Vincent and Monje, Sascha and Corbella, Carles and Schulz-von der Gathen, Volker and von Keudell, Achim and de los Arcos de Pedro, Maria Teresa}, year={2017} }
Layes, Vincent, Sascha Monje, Carles Corbella, Volker Schulz-von der Gathen, Achim von Keudell, and Maria Teresa de los Arcos de Pedro. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” Journal of Applied Physics, 2017. https://doi.org/10.1063/1.4977820.
V. Layes, S. Monje, C. Corbella, V. Schulz-von der Gathen, A. von Keudell, and M. T. de los Arcos de Pedro, “Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics,” Journal of Applied Physics, Art. no. 171912, 2017, doi: 10.1063/1.4977820.
Layes, Vincent, et al. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” Journal of Applied Physics, 171912, 2017, doi:10.1063/1.4977820.
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