Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development
L. Mai, M. Gebhard, M.T. de los Arcos de Pedro, I. Giner, F. Mitschker, M. Winter, H. Parala, P. Awakowicz, G. Grundmeier, A. Devi, Chemistry - A European Journal (2017) 10768–10772.
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Journal Article
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| English
Author
Mai, Lukas;
Gebhard, Maximilian;
de los Arcos de Pedro, Maria TeresaLibreCat;
Giner, Ignacio;
Mitschker, Felix;
Winter, Manuela;
Parala, Harish;
Awakowicz, Peter;
Grundmeier, Guido;
Devi, Anjana
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Journal Title
Chemistry - A European Journal
Page
10768-10772
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Cite this
Mai L, Gebhard M, de los Arcos de Pedro MT, et al. Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development. Chemistry - A European Journal. Published online 2017:10768-10772. doi:10.1002/chem.201702939
Mai, L., Gebhard, M., de los Arcos de Pedro, M. T., Giner, I., Mitschker, F., Winter, M., Parala, H., Awakowicz, P., Grundmeier, G., & Devi, A. (2017). Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development. Chemistry - A European Journal, 10768–10772. https://doi.org/10.1002/chem.201702939
@article{Mai_Gebhard_de los Arcos de Pedro_Giner_Mitschker_Winter_Parala_Awakowicz_Grundmeier_Devi_2017, title={Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development}, DOI={10.1002/chem.201702939}, journal={Chemistry - A European Journal}, author={Mai, Lukas and Gebhard, Maximilian and de los Arcos de Pedro, Maria Teresa and Giner, Ignacio and Mitschker, Felix and Winter, Manuela and Parala, Harish and Awakowicz, Peter and Grundmeier, Guido and Devi, Anjana}, year={2017}, pages={10768–10772} }
Mai, Lukas, Maximilian Gebhard, Maria Teresa de los Arcos de Pedro, Ignacio Giner, Felix Mitschker, Manuela Winter, Harish Parala, Peter Awakowicz, Guido Grundmeier, and Anjana Devi. “Unearthing [3-(Dimethylamino)Propyl]Aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development.” Chemistry - A European Journal, 2017, 10768–72. https://doi.org/10.1002/chem.201702939.
L. Mai et al., “Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development,” Chemistry - A European Journal, pp. 10768–10772, 2017, doi: 10.1002/chem.201702939.
Mai, Lukas, et al. “Unearthing [3-(Dimethylamino)Propyl]Aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development.” Chemistry - A European Journal, 2017, pp. 10768–72, doi:10.1002/chem.201702939.
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