Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition

V.-S. Dang, H. Parala, J.H. Kim, K. Xu, N.B. Srinivasan, E. Edengeiser, M. Havenith, A.D. Wieck, T. de los Arcos, R.A. Fischer, A. Devi, Physica Status Solidi (A) (2013) 416–424.

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Journal Article | Published | English
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physica status solidi (a)
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416-424
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Dang V-S, Parala H, Kim JH, et al. Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition. physica status solidi (a). 2013:416-424. doi:10.1002/pssa.201330115
Dang, V.-S., Parala, H., Kim, J. H., Xu, K., Srinivasan, N. B., Edengeiser, E., … Devi, A. (2013). Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition. Physica Status Solidi (A), 416–424. https://doi.org/10.1002/pssa.201330115
@article{Dang_Parala_Kim_Xu_Srinivasan_Edengeiser_Havenith_Wieck_de los Arcos_Fischer_et al._2013, title={Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition}, DOI={10.1002/pssa.201330115}, journal={physica status solidi (a)}, author={Dang, Van-Son and Parala, Harish and Kim, Jin Hyun and Xu, Ke and Srinivasan, Nagendra B. and Edengeiser, Eugen and Havenith, Martina and Wieck, Andreas D. and de los Arcos, Teresa and Fischer, Roland. A. and et al.}, year={2013}, pages={416–424} }
Dang, Van-Son, Harish Parala, Jin Hyun Kim, Ke Xu, Nagendra B. Srinivasan, Eugen Edengeiser, Martina Havenith, et al. “Electrical and Optical Properties of TiO2thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition.” Physica Status Solidi (A), 2013, 416–24. https://doi.org/10.1002/pssa.201330115.
V.-S. Dang et al., “Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition,” physica status solidi (a), pp. 416–424, 2013.
Dang, Van-Son, et al. “Electrical and Optical Properties of TiO2thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition.” Physica Status Solidi (A), 2013, pp. 416–24, doi:10.1002/pssa.201330115.

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