Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate
M.T. de los Arcos de Pedro, R. Schröder, Y.A. Gonzalvo, V.S. der Gathen, J. Winter, Plasma Sources Science and Technology (2014).
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Journal Article
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| English
Author
de los Arcos de Pedro, Maria TeresaLibreCat;
Schröder, Raphael;
Gonzalvo, Yolanda Aranda;
Gathen, Volker Schulz-von der;
Winter, Jörg
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Publishing Year
Journal Title
Plasma Sources Science and Technology
Article Number
054008
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de los Arcos de Pedro MT, Schröder R, Gonzalvo YA, Gathen VS der, Winter J. Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate. Plasma Sources Science and Technology. Published online 2014. doi:10.1088/0963-0252/23/5/054008
de los Arcos de Pedro, M. T., Schröder, R., Gonzalvo, Y. A., Gathen, V. S. der, & Winter, J. (2014). Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate. Plasma Sources Science and Technology, Article 054008. https://doi.org/10.1088/0963-0252/23/5/054008
@article{de los Arcos de Pedro_Schröder_Gonzalvo_Gathen_Winter_2014, title={Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate}, DOI={10.1088/0963-0252/23/5/054008}, number={054008}, journal={Plasma Sources Science and Technology}, author={de los Arcos de Pedro, Maria Teresa and Schröder, Raphael and Gonzalvo, Yolanda Aranda and Gathen, Volker Schulz-von der and Winter, Jörg}, year={2014} }
Arcos de Pedro, Maria Teresa de los, Raphael Schröder, Yolanda Aranda Gonzalvo, Volker Schulz-von der Gathen, and Jörg Winter. “Description of HiPIMS Plasma Regimes in Terms of Composition, Spoke Formation and Deposition Rate.” Plasma Sources Science and Technology, 2014. https://doi.org/10.1088/0963-0252/23/5/054008.
M. T. de los Arcos de Pedro, R. Schröder, Y. A. Gonzalvo, V. S. der Gathen, and J. Winter, “Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate,” Plasma Sources Science and Technology, Art. no. 054008, 2014, doi: 10.1088/0963-0252/23/5/054008.
de los Arcos de Pedro, Maria Teresa, et al. “Description of HiPIMS Plasma Regimes in Terms of Composition, Spoke Formation and Deposition Rate.” Plasma Sources Science and Technology, 054008, 2014, doi:10.1088/0963-0252/23/5/054008.
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