Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

T. de los Arcos, R. Schröder, Y.A. Gonzalvo, V.S. der Gathen, J. Winter, Plasma Sources Science and Technology (2014).

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Journal Article | Published | English
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Plasma Sources Science and Technology
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054008
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Arcos T de los, Schröder R, Gonzalvo YA, Gathen VS der, Winter J. Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate. Plasma Sources Science and Technology. 2014. doi:10.1088/0963-0252/23/5/054008
Arcos, T. de los, Schröder, R., Gonzalvo, Y. A., Gathen, V. S. der, & Winter, J. (2014). Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/23/5/054008
@article{Arcos_Schröder_Gonzalvo_Gathen_Winter_2014, title={Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate}, DOI={10.1088/0963-0252/23/5/054008}, number={054008}, journal={Plasma Sources Science and Technology}, author={Arcos, Teresa de los and Schröder, Raphael and Gonzalvo, Yolanda Aranda and Gathen, Volker Schulz-von der and Winter, Jörg}, year={2014} }
Arcos, Teresa de los, Raphael Schröder, Yolanda Aranda Gonzalvo, Volker Schulz-von der Gathen, and Jörg Winter. “Description of HiPIMS Plasma Regimes in Terms of Composition, Spoke Formation and Deposition Rate.” Plasma Sources Science and Technology, 2014. https://doi.org/10.1088/0963-0252/23/5/054008.
T. de los Arcos, R. Schröder, Y. A. Gonzalvo, V. S. der Gathen, and J. Winter, “Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate,” Plasma Sources Science and Technology, 2014.
Arcos, Teresa de los, et al. “Description of HiPIMS Plasma Regimes in Terms of Composition, Spoke Formation and Deposition Rate.” Plasma Sources Science and Technology, 054008, 2014, doi:10.1088/0963-0252/23/5/054008.

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