Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).
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Journal Article
| Published
| English
Author
Corbella, Carles;
Grosse-Kreul, Simon;
Kreiter, Oliver;
de los Arcos de Pedro, Maria TeresaLibreCat;
Benedikt, Jan;
von Keudell, Achim
Department
Publishing Year
Journal Title
Review of Scientific Instruments
Article Number
103303
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Corbella C, Grosse-Kreul S, Kreiter O, de los Arcos de Pedro MT, Benedikt J, von Keudell A. Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. Review of Scientific Instruments. Published online 2013. doi:10.1063/1.4826066
Corbella, C., Grosse-Kreul, S., Kreiter, O., de los Arcos de Pedro, M. T., Benedikt, J., & von Keudell, A. (2013). Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. Review of Scientific Instruments, Article 103303. https://doi.org/10.1063/1.4826066
@article{Corbella_Grosse-Kreul_Kreiter_de los Arcos de Pedro_Benedikt_von Keudell_2013, title={Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces}, DOI={10.1063/1.4826066}, number={103303}, journal={Review of Scientific Instruments}, author={Corbella, Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos de Pedro, Maria Teresa and Benedikt, Jan and von Keudell, Achim}, year={2013} }
Corbella, Carles, Simon Grosse-Kreul, Oliver Kreiter, Maria Teresa de los Arcos de Pedro, Jan Benedikt, and Achim von Keudell. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” Review of Scientific Instruments, 2013. https://doi.org/10.1063/1.4826066.
C. Corbella, S. Grosse-Kreul, O. Kreiter, M. T. de los Arcos de Pedro, J. Benedikt, and A. von Keudell, “Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces,” Review of Scientific Instruments, Art. no. 103303, 2013, doi: 10.1063/1.4826066.
Corbella, Carles, et al. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” Review of Scientific Instruments, 103303, 2013, doi:10.1063/1.4826066.
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