Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

C. Corbella, S. Grosse-Kreul, O. Kreiter, T. de los Arcos, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).

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Journal Article | Published | English
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Review of Scientific Instruments
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103303
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Corbella C, Grosse-Kreul S, Kreiter O, de los Arcos T, Benedikt J, von Keudell A. Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. Review of Scientific Instruments. 2013. doi:10.1063/1.4826066
Corbella, C., Grosse-Kreul, S., Kreiter, O., de los Arcos, T., Benedikt, J., & von Keudell, A. (2013). Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. Review of Scientific Instruments. https://doi.org/10.1063/1.4826066
@article{Corbella_Grosse-Kreul_Kreiter_de los Arcos_Benedikt_von Keudell_2013, title={Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces}, DOI={10.1063/1.4826066}, number={103303}, journal={Review of Scientific Instruments}, author={Corbella, Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos, Teresa and Benedikt, Jan and von Keudell, Achim}, year={2013} }
Corbella, Carles, Simon Grosse-Kreul, Oliver Kreiter, Teresa de los Arcos, Jan Benedikt, and Achim von Keudell. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” Review of Scientific Instruments, 2013. https://doi.org/10.1063/1.4826066.
C. Corbella, S. Grosse-Kreul, O. Kreiter, T. de los Arcos, J. Benedikt, and A. von Keudell, “Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces,” Review of Scientific Instruments, 2013.
Corbella, Carles, et al. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” Review of Scientific Instruments, 103303, 2013, doi:10.1063/1.4826066.

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