Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure

K. Rügner, R. Reuter, D. Ellerweg, T. de los Arcos, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.

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Journal Article | Published | English
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Plasma Processes and Polymers
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1061-1073
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Rügner K, Reuter R, Ellerweg D, de los Arcos T, von Keudell A, Benedikt J. Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers. 2013:1061-1073. doi:10.1002/ppap.201300059
Rügner, K., Reuter, R., Ellerweg, D., de los Arcos, T., von Keudell, A., & Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers, 1061–1073. https://doi.org/10.1002/ppap.201300059
@article{Rügner_Reuter_Ellerweg_de los Arcos_von Keudell_Benedikt_2013, title={Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure}, DOI={10.1002/ppap.201300059}, journal={Plasma Processes and Polymers}, author={Rügner, Katja and Reuter, Rüdiger and Ellerweg, Dirk and de los Arcos, Teresa and von Keudell, Achim and Benedikt, Jan}, year={2013}, pages={1061–1073} }
Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Teresa de los Arcos, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” Plasma Processes and Polymers, 2013, 1061–73. https://doi.org/10.1002/ppap.201300059.
K. Rügner, R. Reuter, D. Ellerweg, T. de los Arcos, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1061–1073, 2013.
Rügner, Katja, et al. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” Plasma Processes and Polymers, 2013, pp. 1061–73, doi:10.1002/ppap.201300059.

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