Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.
Download
No fulltext has been uploaded.
Journal Article
| Published
| English
Author
Rügner, Katja;
Reuter, Rüdiger;
Ellerweg, Dirk;
de los Arcos de Pedro, Maria TeresaLibreCat;
von Keudell, Achim;
Benedikt, Jan
Department
Publishing Year
Journal Title
Plasma Processes and Polymers
Page
1061-1073
ISSN
LibreCat-ID
Cite this
Rügner K, Reuter R, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt J. Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers. Published online 2013:1061-1073. doi:10.1002/ppap.201300059
Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., & Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers, 1061–1073. https://doi.org/10.1002/ppap.201300059
@article{Rügner_Reuter_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2013, title={Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure}, DOI={10.1002/ppap.201300059}, journal={Plasma Processes and Polymers}, author={Rügner, Katja and Reuter, Rüdiger and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2013}, pages={1061–1073} }
Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” Plasma Processes and Polymers, 2013, 1061–73. https://doi.org/10.1002/ppap.201300059.
K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1061–1073, 2013, doi: 10.1002/ppap.201300059.
Rügner, Katja, et al. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” Plasma Processes and Polymers, 2013, pp. 1061–73, doi:10.1002/ppap.201300059.
Google Scholar