Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition

T. de los Arcos, S. Cwik, A.P. Milanov, V. Gwildies, H. Parala, T. Wagner, A. Birkner, D. Rogalla, H.-W. Becker, J. Winter, A. Ludwig, R.A. Fischer, A. Devi, Thin Solid Films (2011) 11–16.

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Journal Article | Published | English
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Thin Solid Films
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de los Arcos T, Cwik S, Milanov AP, et al. Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition. Thin Solid Films. 2011:11-16. doi:10.1016/j.tsf.2011.12.007
de los Arcos, T., Cwik, S., Milanov, A. P., Gwildies, V., Parala, H., Wagner, T., … Devi, A. (2011). Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition. Thin Solid Films, 11–16. https://doi.org/10.1016/j.tsf.2011.12.007
@article{de los Arcos_Cwik_Milanov_Gwildies_Parala_Wagner_Birkner_Rogalla_Becker_Winter_et al._2011, title={Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition}, DOI={10.1016/j.tsf.2011.12.007}, journal={Thin Solid Films}, author={de los Arcos, Teresa and Cwik, Stefan and Milanov, Andrian P. and Gwildies, Vanessa and Parala, Harish and Wagner, Tristan and Birkner, Alexander and Rogalla, Detlef and Becker, Hans-Werner and Winter, Jörg and et al.}, year={2011}, pages={11–16} }
Arcos, Teresa de los, Stefan Cwik, Andrian P. Milanov, Vanessa Gwildies, Harish Parala, Tristan Wagner, Alexander Birkner, et al. “Influence of Process Parameters on the Crystallinity, Morphology and Composition of Tungsten Oxide-Based Thin Films Grown by Metalorganic Chemical Vapor Deposition.” Thin Solid Films, 2011, 11–16. https://doi.org/10.1016/j.tsf.2011.12.007.
T. de los Arcos et al., “Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition,” Thin Solid Films, pp. 11–16, 2011.
de los Arcos, Teresa, et al. “Influence of Process Parameters on the Crystallinity, Morphology and Composition of Tungsten Oxide-Based Thin Films Grown by Metalorganic Chemical Vapor Deposition.” Thin Solid Films, 2011, pp. 11–16, doi:10.1016/j.tsf.2011.12.007.

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