Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

Milanov, A. P., Xu, K., Cwik, S., Parala, H., de los Arcos de Pedro, M. T., Becker, H.-W., Rogalla, D., Cross, R., Paul, S., & Devi, A. (2012). Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors. Dalton Transactions, Article 13936. https://doi.org/10.1039/c2dt31219k

@article{Milanov_Xu_Cwik_Parala_de los Arcos de Pedro_Becker_Rogalla_Cross_Paul_Devi_2012, title={Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors}, DOI={10.1039/c2dt31219k}, number={13936}, journal={Dalton Transactions}, author={Milanov, Andrian P. and Xu, Ke and Cwik, Stefan and Parala, Harish and de los Arcos de Pedro, Maria Teresa and Becker, Hans-Werner and Rogalla, Detlef and Cross, Richard and Paul, Shashi and Devi, Anjana}, year={2012} }

Milanov, Andrian P., Ke Xu, Stefan Cwik, Harish Parala, Maria Teresa de los Arcos de Pedro, Hans-Werner Becker, Detlef Rogalla, Richard Cross, Shashi Paul, and Anjana Devi. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from Volatile Guanidinate Class of Rare-Earth Precursors.” Dalton Transactions, 2012. https://doi.org/10.1039/c2dt31219k.

A. P. Milanov et al., “Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors,” Dalton Transactions, Art. no. 13936, 2012, doi: 10.1039/c2dt31219k.

Milanov, Andrian P., et al. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from Volatile Guanidinate Class of Rare-Earth Precursors.” Dalton Transactions, 13936, 2012, doi:10.1039/c2dt31219k.