Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

A.P. Milanov, K. Xu, S. Cwik, H. Parala, T. de los Arcos, H.-W. Becker, D. Rogalla, R. Cross, S. Paul, A. Devi, Dalton Transactions (2012).

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Journal Article | Published | English
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Dalton Transactions
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13936
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Milanov AP, Xu K, Cwik S, et al. Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors. Dalton Transactions. 2012. doi:10.1039/c2dt31219k
Milanov, A. P., Xu, K., Cwik, S., Parala, H., de los Arcos, T., Becker, H.-W., … Devi, A. (2012). Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors. Dalton Transactions. https://doi.org/10.1039/c2dt31219k
@article{Milanov_Xu_Cwik_Parala_de los Arcos_Becker_Rogalla_Cross_Paul_Devi_2012, title={Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors}, DOI={10.1039/c2dt31219k}, number={13936}, journal={Dalton Transactions}, author={Milanov, Andrian P. and Xu, Ke and Cwik, Stefan and Parala, Harish and de los Arcos, Teresa and Becker, Hans-Werner and Rogalla, Detlef and Cross, Richard and Paul, Shashi and Devi, Anjana}, year={2012} }
Milanov, Andrian P., Ke Xu, Stefan Cwik, Harish Parala, Teresa de los Arcos, Hans-Werner Becker, Detlef Rogalla, Richard Cross, Shashi Paul, and Anjana Devi. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from Volatile Guanidinate Class of Rare-Earth Precursors.” Dalton Transactions, 2012. https://doi.org/10.1039/c2dt31219k.
A. P. Milanov et al., “Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors,” Dalton Transactions, 2012.
Milanov, Andrian P., et al. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from Volatile Guanidinate Class of Rare-Earth Precursors.” Dalton Transactions, 13936, 2012, doi:10.1039/c2dt31219k.

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