Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films

M. Prenzel, T. de los Arcos, A. Kortmann, J. Winter, A. von Keudell, Journal of Applied Physics (2012).

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Journal Article | Published | English
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Journal of Applied Physics
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103306
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Prenzel M, de los Arcos T, Kortmann A, Winter J, von Keudell A. Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films. Journal of Applied Physics. 2012. doi:10.1063/1.4767383
Prenzel, M., de los Arcos, T., Kortmann, A., Winter, J., & von Keudell, A. (2012). Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films. Journal of Applied Physics. https://doi.org/10.1063/1.4767383
@article{Prenzel_de los Arcos_Kortmann_Winter_von Keudell_2012, title={Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films}, DOI={10.1063/1.4767383}, number={103306}, journal={Journal of Applied Physics}, author={Prenzel, Marina and de los Arcos, Teresa and Kortmann, Annika and Winter, Jörg and von Keudell, Achim}, year={2012} }
Prenzel, Marina, Teresa de los Arcos, Annika Kortmann, Jörg Winter, and Achim von Keudell. “Embedded Argon as a Tool for Sampling Local Structure in Thin Plasma Deposited Aluminum Oxide Films.” Journal of Applied Physics, 2012. https://doi.org/10.1063/1.4767383.
M. Prenzel, T. de los Arcos, A. Kortmann, J. Winter, and A. von Keudell, “Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films,” Journal of Applied Physics, 2012.
Prenzel, Marina, et al. “Embedded Argon as a Tool for Sampling Local Structure in Thin Plasma Deposited Aluminum Oxide Films.” Journal of Applied Physics, 103306, 2012, doi:10.1063/1.4767383.

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