The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure

R. Reuter, K. Rügner, D. Ellerweg, T. de los Arcos, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.

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Journal Article | Published | English
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Plasma Processes and Polymers
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1116-1124
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Reuter R, Rügner K, Ellerweg D, de los Arcos T, von Keudell A, Benedikt J. The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers. 2012:1116-1124. doi:10.1002/ppap.201100146
Reuter, R., Rügner, K., Ellerweg, D., de los Arcos, T., von Keudell, A., & Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers, 1116–1124. https://doi.org/10.1002/ppap.201100146
@article{Reuter_Rügner_Ellerweg_de los Arcos_von Keudell_Benedikt_2012, title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure}, DOI={10.1002/ppap.201100146}, journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja and Ellerweg, Dirk and de los Arcos, Teresa and von Keudell, Achim and Benedikt, Jan}, year={2012}, pages={1116–1124} }
Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Teresa de los Arcos, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” Plasma Processes and Polymers, 2012, 1116–24. https://doi.org/10.1002/ppap.201100146.
R. Reuter, K. Rügner, D. Ellerweg, T. de los Arcos, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1116–1124, 2012.
Reuter, Rüdiger, et al. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” Plasma Processes and Polymers, 2012, pp. 1116–24, doi:10.1002/ppap.201100146.

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