The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
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Journal Article
| Published
| English
Author
Reuter, Rüdiger;
Rügner, Katja;
Ellerweg, Dirk;
de los Arcos de Pedro, Maria TeresaLibreCat;
von Keudell, Achim;
Benedikt, Jan
Department
Publishing Year
Journal Title
Plasma Processes and Polymers
Page
1116-1124
ISSN
LibreCat-ID
Cite this
Reuter R, Rügner K, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt J. The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers. Published online 2012:1116-1124. doi:10.1002/ppap.201100146
Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., & Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers, 1116–1124. https://doi.org/10.1002/ppap.201100146
@article{Reuter_Rügner_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2012, title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure}, DOI={10.1002/ppap.201100146}, journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2012}, pages={1116–1124} }
Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” Plasma Processes and Polymers, 2012, 1116–24. https://doi.org/10.1002/ppap.201100146.
R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1116–1124, 2012, doi: 10.1002/ppap.201100146.
Reuter, Rüdiger, et al. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” Plasma Processes and Polymers, 2012, pp. 1116–24, doi:10.1002/ppap.201100146.
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