Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide
L. Mai, N. Boysen, D. Zanders, T. de los Arcos, F. Mitschker, B. Mallick, G. Grundmeier, P. Awakowicz, A. Devi, Chemistry – A European Journal (2019) 7489–7500.
Download
No fulltext has been uploaded.
Journal Article
| Published
| English
Author
Mai, Lukas;
Boysen, Nils;
Zanders, David;
de los Arcos, Teresa;
Mitschker, Felix;
Mallick, Bert;
Grundmeier, GuidoLibreCat;
Awakowicz, Peter;
Devi, Anjana
Publishing Year
Journal Title
Chemistry – A European Journal
Page
7489-7500
LibreCat-ID
Cite this
Mai L, Boysen N, Zanders D, et al. Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide. Chemistry – A European Journal. 2019:7489-7500. doi:10.1002/chem.201900475
Mai, L., Boysen, N., Zanders, D., de los Arcos, T., Mitschker, F., Mallick, B., … Devi, A. (2019). Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide. Chemistry – A European Journal, 7489–7500. https://doi.org/10.1002/chem.201900475
@article{Mai_Boysen_Zanders_de los Arcos_Mitschker_Mallick_Grundmeier_Awakowicz_Devi_2019, title={Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide}, DOI={10.1002/chem.201900475}, journal={Chemistry – A European Journal}, author={Mai, Lukas and Boysen, Nils and Zanders, David and de los Arcos, Teresa and Mitschker, Felix and Mallick, Bert and Grundmeier, Guido and Awakowicz, Peter and Devi, Anjana}, year={2019}, pages={7489–7500} }
Mai, Lukas, Nils Boysen, David Zanders, Teresa de los Arcos, Felix Mitschker, Bert Mallick, Guido Grundmeier, Peter Awakowicz, and Anjana Devi. “Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide.” Chemistry – A European Journal, 2019, 7489–7500. https://doi.org/10.1002/chem.201900475.
L. Mai et al., “Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide,” Chemistry – A European Journal, pp. 7489–7500, 2019.
Mai, Lukas, et al. “Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide.” Chemistry – A European Journal, 2019, pp. 7489–500, doi:10.1002/chem.201900475.
Google Scholar