Laser-lithographically written micron-wide superconducting nanowire single-photon detectors
M. Protte, V.B. Verma, J.P. Höpker, R.P. Mirin, S. Woo Nam, T. Bartley, Superconductor Science and Technology 35 (2022).
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Journal Article
| Published
| English
Author
Protte, MaximilianLibreCat;
Verma, Varun B;
Höpker, Jan PhilippLibreCat;
Mirin, Richard P;
Woo Nam, Sae;
Bartley, TimLibreCat
Department
Abstract
<jats:title>Abstract</jats:title>
<jats:p>We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths ranging from 0.59 <jats:italic>µ</jats:italic>m to 1.43 <jats:italic>µ</jats:italic>m under illumination at 1550 nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4 mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire widths around 1 <jats:italic>µ</jats:italic>m.</jats:p>
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Publishing Year
Journal Title
Superconductor Science and Technology
Volume
35
Issue
5
Article Number
055005
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Cite this
Protte M, Verma VB, Höpker JP, Mirin RP, Woo Nam S, Bartley T. Laser-lithographically written micron-wide superconducting nanowire single-photon detectors. Superconductor Science and Technology. 2022;35(5). doi:10.1088/1361-6668/ac5338
Protte, M., Verma, V. B., Höpker, J. P., Mirin, R. P., Woo Nam, S., & Bartley, T. (2022). Laser-lithographically written micron-wide superconducting nanowire single-photon detectors. Superconductor Science and Technology, 35(5), Article 055005. https://doi.org/10.1088/1361-6668/ac5338
@article{Protte_Verma_Höpker_Mirin_Woo Nam_Bartley_2022, title={Laser-lithographically written micron-wide superconducting nanowire single-photon detectors}, volume={35}, DOI={10.1088/1361-6668/ac5338}, number={5055005}, journal={Superconductor Science and Technology}, publisher={IOP Publishing}, author={Protte, Maximilian and Verma, Varun B and Höpker, Jan Philipp and Mirin, Richard P and Woo Nam, Sae and Bartley, Tim}, year={2022} }
Protte, Maximilian, Varun B Verma, Jan Philipp Höpker, Richard P Mirin, Sae Woo Nam, and Tim Bartley. “Laser-Lithographically Written Micron-Wide Superconducting Nanowire Single-Photon Detectors.” Superconductor Science and Technology 35, no. 5 (2022). https://doi.org/10.1088/1361-6668/ac5338.
M. Protte, V. B. Verma, J. P. Höpker, R. P. Mirin, S. Woo Nam, and T. Bartley, “Laser-lithographically written micron-wide superconducting nanowire single-photon detectors,” Superconductor Science and Technology, vol. 35, no. 5, Art. no. 055005, 2022, doi: 10.1088/1361-6668/ac5338.
Protte, Maximilian, et al. “Laser-Lithographically Written Micron-Wide Superconducting Nanowire Single-Photon Detectors.” Superconductor Science and Technology, vol. 35, no. 5, 055005, IOP Publishing, 2022, doi:10.1088/1361-6668/ac5338.
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